3/12/2010	12:07:05 AM	Helium valve closed
3/12/2010	12:07:05 AM	H2 valve closed
3/12/2010	12:07:05 AM	BCl3 valve closed
3/12/2010	12:07:05 AM	PH3 valve closed
3/12/2010	12:07:05 AM	SiCl4 pre valve closed
3/12/2010	12:07:05 AM	SiCl4 post valve closed
3/12/2010	12:07:05 AM	Main Vac valve closed
3/12/2010	12:07:05 AM	Bypass valve closed
3/12/2010	12:07:05 AM	Bubbler valve closed
3/12/2010	12:07:05 AM	Helium MFC set to  0.000000
3/12/2010	12:07:05 AM	H2 MFC set to  0.000000
3/12/2010	12:07:05 AM	BCl3 MFC set to  0.000000
3/12/2010	12:07:05 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:07:05 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:07:05 AM	Tube furnace set to 0
3/12/2010	12:07:06 AM	Run finished at 12:07 AM
3/12/2010	12:48:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:48:47 AM	Recipe started at 12:48 AM
3/12/2010	12:48:47 AM	Helium valve closed
3/12/2010	12:48:47 AM	H2 valve closed
3/12/2010	12:48:47 AM	BCl3 valve closed
3/12/2010	12:48:47 AM	PH3 valve closed
3/12/2010	12:48:47 AM	SiCl4 pre valve closed
3/12/2010	12:48:47 AM	SiCl4 post valve closed
3/12/2010	12:48:47 AM	Main Vac valve closed
3/12/2010	12:48:47 AM	Bubbler valve closed
3/12/2010	12:48:47 AM	Bypass valve opened
3/12/2010	12:48:47 AM	Helium MFC set to  0.000000
3/12/2010	12:48:47 AM	H2 MFC set to  0.000000
3/12/2010	12:48:47 AM	BCl3 MFC set to  0.000000
3/12/2010	12:48:47 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:48:47 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:48:47 AM	Tube furnace set to 0
3/12/2010	12:49:19 AM	Helium valve closed
3/12/2010	12:49:19 AM	H2 valve closed
3/12/2010	12:49:19 AM	BCl3 valve closed
3/12/2010	12:49:19 AM	PH3 valve closed
3/12/2010	12:49:19 AM	SiCl4 pre valve closed
3/12/2010	12:49:19 AM	SiCl4 post valve closed
3/12/2010	12:49:19 AM	Bubbler valve closed
3/12/2010	12:49:19 AM	Main Vac valve opened
3/12/2010	12:49:19 AM	Bypass valve opened
3/12/2010	12:49:19 AM	Helium MFC set to  0.000000
3/12/2010	12:49:19 AM	H2 MFC set to  0.000000
3/12/2010	12:49:19 AM	BCl3 MFC set to  0.000000
3/12/2010	12:49:19 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:49:19 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:49:19 AM	Tube furnace set to 0
3/12/2010	12:49:19 AM	Run finished at 12:49 AM
3/12/2010	12:49:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:50:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:50:13 AM	Recipe started at 12:50 AM
3/12/2010	12:50:13 AM	Helium valve closed
3/12/2010	12:50:13 AM	H2 valve closed
3/12/2010	12:50:13 AM	BCl3 valve closed
3/12/2010	12:50:13 AM	PH3 valve closed
3/12/2010	12:50:13 AM	SiCl4 pre valve closed
3/12/2010	12:50:13 AM	SiCl4 post valve closed
3/12/2010	12:50:13 AM	Main Vac valve closed
3/12/2010	12:50:13 AM	Bubbler valve closed
3/12/2010	12:50:13 AM	Bypass valve opened
3/12/2010	12:50:13 AM	Helium MFC set to  0.000000
3/12/2010	12:50:13 AM	H2 MFC set to  0.000000
3/12/2010	12:50:13 AM	BCl3 MFC set to  0.000000
3/12/2010	12:50:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:50:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:50:13 AM	Tube furnace set to 0
3/12/2010	12:50:13 AM	Helium valve closed
3/12/2010	12:50:13 AM	H2 valve closed
3/12/2010	12:50:13 AM	BCl3 valve closed
3/12/2010	12:50:13 AM	PH3 valve closed
3/12/2010	12:50:13 AM	SiCl4 pre valve closed
3/12/2010	12:50:13 AM	SiCl4 post valve closed
3/12/2010	12:50:13 AM	Bubbler valve closed
3/12/2010	12:50:13 AM	Main Vac valve opened
3/12/2010	12:50:13 AM	Bypass valve opened
3/12/2010	12:50:13 AM	Helium MFC set to  0.000000
3/12/2010	12:50:13 AM	H2 MFC set to  0.000000
3/12/2010	12:50:13 AM	BCl3 MFC set to  0.000000
3/12/2010	12:50:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:50:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:50:13 AM	Tube furnace set to 0
3/12/2010	12:50:14 AM	Run finished at 12:50 AM
3/12/2010	12:50:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:51:12 AM	Recipe started at 12:51 AM
3/12/2010	12:51:12 AM	H2 valve closed
3/12/2010	12:51:12 AM	BCl3 valve closed
3/12/2010	12:51:12 AM	PH3 valve closed
3/12/2010	12:51:12 AM	SiCl4 pre valve closed
3/12/2010	12:51:12 AM	SiCl4 post valve closed
3/12/2010	12:51:12 AM	Main Vac valve closed
3/12/2010	12:51:12 AM	Bypass valve closed
3/12/2010	12:51:12 AM	Bubbler valve closed
3/12/2010	12:51:12 AM	Helium valve opened
3/12/2010	12:51:12 AM	Helium MFC set to  500.000000
3/12/2010	12:51:12 AM	H2 MFC set to  0.000000
3/12/2010	12:51:12 AM	BCl3 MFC set to  0.000000
3/12/2010	12:51:12 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:51:12 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:51:12 AM	Tube furnace set to 0
3/12/2010	12:52:34 AM	Helium valve closed
3/12/2010	12:52:34 AM	H2 valve closed
3/12/2010	12:52:34 AM	BCl3 valve closed
3/12/2010	12:52:34 AM	PH3 valve closed
3/12/2010	12:52:34 AM	SiCl4 pre valve closed
3/12/2010	12:52:34 AM	SiCl4 post valve closed
3/12/2010	12:52:34 AM	Main Vac valve closed
3/12/2010	12:52:34 AM	Bypass valve closed
3/12/2010	12:52:34 AM	Bubbler valve closed
3/12/2010	12:52:34 AM	Helium MFC set to  0.000000
3/12/2010	12:52:34 AM	H2 MFC set to  0.000000
3/12/2010	12:52:34 AM	BCl3 MFC set to  0.000000
3/12/2010	12:52:34 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:52:34 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:52:34 AM	Tube furnace set to 0
3/12/2010	12:52:49 AM	Helium valve closed
3/12/2010	12:52:49 AM	H2 valve closed
3/12/2010	12:52:49 AM	BCl3 valve closed
3/12/2010	12:52:49 AM	PH3 valve closed
3/12/2010	12:52:49 AM	SiCl4 pre valve closed
3/12/2010	12:52:49 AM	SiCl4 post valve closed
3/12/2010	12:52:49 AM	Main Vac valve closed
3/12/2010	12:52:49 AM	Bubbler valve closed
3/12/2010	12:52:49 AM	Bypass valve opened
3/12/2010	12:52:49 AM	Helium MFC set to  0.000000
3/12/2010	12:52:49 AM	H2 MFC set to  0.000000
3/12/2010	12:52:49 AM	BCl3 MFC set to  0.000000
3/12/2010	12:52:49 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:52:49 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:52:49 AM	Tube furnace set to 0
3/12/2010	12:53:12 AM	Helium valve closed
3/12/2010	12:53:12 AM	H2 valve closed
3/12/2010	12:53:12 AM	BCl3 valve closed
3/12/2010	12:53:12 AM	PH3 valve closed
3/12/2010	12:53:12 AM	SiCl4 pre valve closed
3/12/2010	12:53:12 AM	SiCl4 post valve closed
3/12/2010	12:53:12 AM	Bubbler valve closed
3/12/2010	12:53:12 AM	Main Vac valve opened
3/12/2010	12:53:12 AM	Bypass valve opened
3/12/2010	12:53:12 AM	Helium MFC set to  0.000000
3/12/2010	12:53:12 AM	H2 MFC set to  0.000000
3/12/2010	12:53:12 AM	BCl3 MFC set to  0.000000
3/12/2010	12:53:12 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:53:12 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:53:12 AM	Tube furnace set to 0
3/12/2010	12:58:12 AM	H2 valve closed
3/12/2010	12:58:12 AM	BCl3 valve closed
3/12/2010	12:58:12 AM	PH3 valve closed
3/12/2010	12:58:12 AM	SiCl4 pre valve closed
3/12/2010	12:58:12 AM	SiCl4 post valve closed
3/12/2010	12:58:12 AM	Main Vac valve closed
3/12/2010	12:58:12 AM	Bypass valve closed
3/12/2010	12:58:12 AM	Bubbler valve closed
3/12/2010	12:58:12 AM	Helium valve opened
3/12/2010	12:58:12 AM	Helium MFC set to  500.000000
3/12/2010	12:58:12 AM	H2 MFC set to  0.000000
3/12/2010	12:58:12 AM	BCl3 MFC set to  0.000000
3/12/2010	12:58:12 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:58:12 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:58:12 AM	Tube furnace set to 0
3/12/2010	12:59:35 AM	Helium valve closed
3/12/2010	12:59:35 AM	H2 valve closed
3/12/2010	12:59:35 AM	BCl3 valve closed
3/12/2010	12:59:35 AM	PH3 valve closed
3/12/2010	12:59:35 AM	SiCl4 pre valve closed
3/12/2010	12:59:35 AM	SiCl4 post valve closed
3/12/2010	12:59:35 AM	Main Vac valve closed
3/12/2010	12:59:35 AM	Bypass valve closed
3/12/2010	12:59:35 AM	Bubbler valve closed
3/12/2010	12:59:35 AM	Helium MFC set to  0.000000
3/12/2010	12:59:35 AM	H2 MFC set to  0.000000
3/12/2010	12:59:35 AM	BCl3 MFC set to  0.000000
3/12/2010	12:59:35 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:59:35 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:59:35 AM	Tube furnace set to 0
3/12/2010	12:59:50 AM	Helium valve closed
3/12/2010	12:59:50 AM	H2 valve closed
3/12/2010	12:59:50 AM	BCl3 valve closed
3/12/2010	12:59:50 AM	PH3 valve closed
3/12/2010	12:59:50 AM	SiCl4 pre valve closed
3/12/2010	12:59:50 AM	SiCl4 post valve closed
3/12/2010	12:59:50 AM	Main Vac valve closed
3/12/2010	12:59:50 AM	Bubbler valve closed
3/12/2010	12:59:50 AM	Bypass valve opened
3/12/2010	12:59:50 AM	Helium MFC set to  0.000000
3/12/2010	12:59:50 AM	H2 MFC set to  0.000000
3/12/2010	12:59:50 AM	BCl3 MFC set to  0.000000
3/12/2010	12:59:50 AM	SiCl4 MFC set to  0.000000
3/12/2010	12:59:50 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:59:50 AM	Tube furnace set to 0
3/12/2010	1:00:12 AM	Helium valve closed
3/12/2010	1:00:12 AM	H2 valve closed
3/12/2010	1:00:12 AM	BCl3 valve closed
3/12/2010	1:00:12 AM	PH3 valve closed
3/12/2010	1:00:12 AM	SiCl4 pre valve closed
3/12/2010	1:00:12 AM	SiCl4 post valve closed
3/12/2010	1:00:12 AM	Bubbler valve closed
3/12/2010	1:00:12 AM	Main Vac valve opened
3/12/2010	1:00:12 AM	Bypass valve opened
3/12/2010	1:00:12 AM	Helium MFC set to  0.000000
3/12/2010	1:00:12 AM	H2 MFC set to  0.000000
3/12/2010	1:00:12 AM	BCl3 MFC set to  0.000000
3/12/2010	1:00:12 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:00:12 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:00:12 AM	Tube furnace set to 0
3/12/2010	1:05:12 AM	H2 valve closed
3/12/2010	1:05:12 AM	BCl3 valve closed
3/12/2010	1:05:12 AM	PH3 valve closed
3/12/2010	1:05:12 AM	SiCl4 pre valve closed
3/12/2010	1:05:12 AM	SiCl4 post valve closed
3/12/2010	1:05:12 AM	Main Vac valve closed
3/12/2010	1:05:12 AM	Bypass valve closed
3/12/2010	1:05:12 AM	Bubbler valve closed
3/12/2010	1:05:12 AM	Helium valve opened
3/12/2010	1:05:12 AM	Helium MFC set to  500.000000
3/12/2010	1:05:12 AM	H2 MFC set to  0.000000
3/12/2010	1:05:12 AM	BCl3 MFC set to  0.000000
3/12/2010	1:05:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:05:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:05:13 AM	Tube furnace set to 0
3/12/2010	1:06:36 AM	Helium valve closed
3/12/2010	1:06:36 AM	H2 valve closed
3/12/2010	1:06:36 AM	BCl3 valve closed
3/12/2010	1:06:36 AM	PH3 valve closed
3/12/2010	1:06:36 AM	SiCl4 pre valve closed
3/12/2010	1:06:36 AM	SiCl4 post valve closed
3/12/2010	1:06:36 AM	Main Vac valve closed
3/12/2010	1:06:36 AM	Bypass valve closed
3/12/2010	1:06:36 AM	Bubbler valve closed
3/12/2010	1:06:36 AM	Helium MFC set to  0.000000
3/12/2010	1:06:36 AM	H2 MFC set to  0.000000
3/12/2010	1:06:36 AM	BCl3 MFC set to  0.000000
3/12/2010	1:06:36 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:06:36 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:06:36 AM	Tube furnace set to 0
3/12/2010	1:06:51 AM	Helium valve closed
3/12/2010	1:06:51 AM	H2 valve closed
3/12/2010	1:06:51 AM	BCl3 valve closed
3/12/2010	1:06:51 AM	PH3 valve closed
3/12/2010	1:06:51 AM	SiCl4 pre valve closed
3/12/2010	1:06:51 AM	SiCl4 post valve closed
3/12/2010	1:06:51 AM	Main Vac valve closed
3/12/2010	1:06:51 AM	Bubbler valve closed
3/12/2010	1:06:51 AM	Bypass valve opened
3/12/2010	1:06:51 AM	Helium MFC set to  0.000000
3/12/2010	1:06:51 AM	H2 MFC set to  0.000000
3/12/2010	1:06:51 AM	BCl3 MFC set to  0.000000
3/12/2010	1:06:51 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:06:51 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:06:51 AM	Tube furnace set to 0
3/12/2010	1:07:13 AM	Helium valve closed
3/12/2010	1:07:13 AM	H2 valve closed
3/12/2010	1:07:13 AM	BCl3 valve closed
3/12/2010	1:07:13 AM	PH3 valve closed
3/12/2010	1:07:13 AM	SiCl4 pre valve closed
3/12/2010	1:07:13 AM	SiCl4 post valve closed
3/12/2010	1:07:13 AM	Bubbler valve closed
3/12/2010	1:07:13 AM	Main Vac valve opened
3/12/2010	1:07:13 AM	Bypass valve opened
3/12/2010	1:07:13 AM	Helium MFC set to  0.000000
3/12/2010	1:07:13 AM	H2 MFC set to  0.000000
3/12/2010	1:07:13 AM	BCl3 MFC set to  0.000000
3/12/2010	1:07:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:07:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:07:13 AM	Tube furnace set to 0
3/12/2010	1:12:13 AM	Helium valve closed
3/12/2010	1:12:13 AM	H2 valve closed
3/12/2010	1:12:13 AM	BCl3 valve closed
3/12/2010	1:12:13 AM	PH3 valve closed
3/12/2010	1:12:13 AM	SiCl4 pre valve closed
3/12/2010	1:12:13 AM	SiCl4 post valve closed
3/12/2010	1:12:13 AM	Bubbler valve closed
3/12/2010	1:12:13 AM	Main Vac valve opened
3/12/2010	1:12:13 AM	Bypass valve opened
3/12/2010	1:12:13 AM	Helium MFC set to  0.000000
3/12/2010	1:12:13 AM	H2 MFC set to  0.000000
3/12/2010	1:12:13 AM	BCl3 MFC set to  0.000000
3/12/2010	1:12:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:12:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:12:13 AM	Tube furnace set to 0
3/12/2010	1:12:14 AM	Run finished at 1:12 AM
3/12/2010	1:21:23 AM	Program started after a nonstandard shutdown
3/12/2010	1:21:24 AM	Helium valve closed
3/12/2010	1:21:24 AM	H2 valve closed
3/12/2010	1:21:24 AM	BCl3 valve closed
3/12/2010	1:21:24 AM	PH3 valve closed
3/12/2010	1:21:24 AM	SiCl4 pre valve closed
3/12/2010	1:21:24 AM	SiCl4 post valve closed
3/12/2010	1:21:24 AM	Main Vac valve closed
3/12/2010	1:21:24 AM	Bypass valve closed
3/12/2010	1:21:24 AM	Bubbler valve closed
3/12/2010	1:21:24 AM	Helium MFC set to  0.000000
3/12/2010	1:21:24 AM	H2 MFC set to  0.000000
3/12/2010	1:21:24 AM	BCl3 MFC set to  0.000000
3/12/2010	1:21:24 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:21:24 AM	Bypass solenoid MFC set to  760.000000
3/12/2010	1:21:24 AM	Tube furnace set to 0
3/12/2010	1:21:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	1:21:26 AM	Recipe started at 1:21 AM
3/12/2010	1:21:26 AM	Helium valve closed
3/12/2010	1:21:26 AM	H2 valve closed
3/12/2010	1:21:26 AM	BCl3 valve closed
3/12/2010	1:21:26 AM	PH3 valve closed
3/12/2010	1:21:26 AM	SiCl4 pre valve closed
3/12/2010	1:21:26 AM	SiCl4 post valve closed
3/12/2010	1:21:26 AM	Main Vac valve closed
3/12/2010	1:21:26 AM	Bubbler valve closed
3/12/2010	1:21:26 AM	Bypass valve opened
3/12/2010	1:21:26 AM	Helium MFC set to  0.000000
3/12/2010	1:21:26 AM	H2 MFC set to  0.000000
3/12/2010	1:21:26 AM	BCl3 MFC set to  0.000000
3/12/2010	1:21:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:21:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:21:26 AM	Tube furnace set to 0
3/12/2010	1:21:26 AM	Helium valve closed
3/12/2010	1:21:26 AM	H2 valve closed
3/12/2010	1:21:26 AM	BCl3 valve closed
3/12/2010	1:21:26 AM	PH3 valve closed
3/12/2010	1:21:26 AM	SiCl4 pre valve closed
3/12/2010	1:21:26 AM	SiCl4 post valve closed
3/12/2010	1:21:26 AM	Bubbler valve closed
3/12/2010	1:21:26 AM	Main Vac valve opened
3/12/2010	1:21:26 AM	Bypass valve opened
3/12/2010	1:21:26 AM	Helium MFC set to  0.000000
3/12/2010	1:21:26 AM	H2 MFC set to  0.000000
3/12/2010	1:21:26 AM	BCl3 MFC set to  0.000000
3/12/2010	1:21:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:21:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:21:26 AM	Tube furnace set to 0
3/12/2010	1:21:27 AM	Run finished at 1:21 AM
3/12/2010	1:21:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	1:28:53 AM	Program started after a nonstandard shutdown
3/12/2010	1:28:53 AM	Helium valve closed
3/12/2010	1:28:53 AM	H2 valve closed
3/12/2010	1:28:53 AM	BCl3 valve closed
3/12/2010	1:28:53 AM	PH3 valve closed
3/12/2010	1:28:53 AM	SiCl4 pre valve closed
3/12/2010	1:28:53 AM	SiCl4 post valve closed
3/12/2010	1:28:53 AM	Main Vac valve closed
3/12/2010	1:28:53 AM	Bypass valve closed
3/12/2010	1:28:53 AM	Bubbler valve closed
3/12/2010	1:28:53 AM	Helium MFC set to  0.000000
3/12/2010	1:28:53 AM	H2 MFC set to  0.000000
3/12/2010	1:28:53 AM	BCl3 MFC set to  0.000000
3/12/2010	1:28:53 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:28:53 AM	Bypass solenoid MFC set to  760.000000
3/12/2010	1:28:53 AM	Tube furnace set to 0
3/12/2010	1:28:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	1:28:55 AM	Recipe started at 1:28 AM
3/12/2010	1:28:55 AM	Helium valve closed
3/12/2010	1:28:55 AM	H2 valve closed
3/12/2010	1:28:55 AM	BCl3 valve closed
3/12/2010	1:28:55 AM	PH3 valve closed
3/12/2010	1:28:55 AM	SiCl4 pre valve closed
3/12/2010	1:28:55 AM	SiCl4 post valve closed
3/12/2010	1:28:55 AM	Main Vac valve closed
3/12/2010	1:28:55 AM	Bubbler valve closed
3/12/2010	1:28:55 AM	Bypass valve opened
3/12/2010	1:28:55 AM	Helium MFC set to  0.000000
3/12/2010	1:28:55 AM	H2 MFC set to  0.000000
3/12/2010	1:28:55 AM	BCl3 MFC set to  0.000000
3/12/2010	1:28:55 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:28:55 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:28:55 AM	Tube furnace set to 0
3/12/2010	1:28:55 AM	Helium valve closed
3/12/2010	1:28:55 AM	H2 valve closed
3/12/2010	1:28:55 AM	BCl3 valve closed
3/12/2010	1:28:55 AM	PH3 valve closed
3/12/2010	1:28:55 AM	SiCl4 pre valve closed
3/12/2010	1:28:55 AM	SiCl4 post valve closed
3/12/2010	1:28:55 AM	Bubbler valve closed
3/12/2010	1:28:55 AM	Main Vac valve opened
3/12/2010	1:28:55 AM	Bypass valve opened
3/12/2010	1:28:55 AM	Helium MFC set to  0.000000
3/12/2010	1:28:55 AM	H2 MFC set to  0.000000
3/12/2010	1:28:55 AM	BCl3 MFC set to  0.000000
3/12/2010	1:28:55 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:28:55 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:28:55 AM	Tube furnace set to 0
3/12/2010	1:28:55 AM	Run finished at 1:28 AM
3/12/2010	1:28:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	1:30:08 AM	Bypass valve closed
3/12/2010	1:30:09 AM	Main Vac valve closed
3/12/2010	1:30:30 AM	Bypass valve opened
3/12/2010	1:30:31 AM	Main Vac valve opened
3/12/2010	1:31:28 AM	Recipe started at 1:31 AM
3/12/2010	1:31:28 AM	Helium valve closed
3/12/2010	1:31:28 AM	BCl3 valve closed
3/12/2010	1:31:28 AM	PH3 valve closed
3/12/2010	1:31:28 AM	SiCl4 pre valve closed
3/12/2010	1:31:28 AM	SiCl4 post valve closed
3/12/2010	1:31:28 AM	Main Vac valve closed
3/12/2010	1:31:28 AM	Bypass valve closed
3/12/2010	1:31:28 AM	Bubbler valve closed
3/12/2010	1:31:28 AM	H2 valve opened
3/12/2010	1:31:28 AM	Helium MFC set to  0.000000
3/12/2010	1:31:28 AM	H2 MFC set to  500.000000
3/12/2010	1:31:28 AM	BCl3 MFC set to  0.000000
3/12/2010	1:31:28 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:31:28 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:31:28 AM	Tube furnace set to 0
3/12/2010	1:32:52 AM	Helium valve closed
3/12/2010	1:32:52 AM	BCl3 valve closed
3/12/2010	1:32:52 AM	PH3 valve closed
3/12/2010	1:32:52 AM	SiCl4 pre valve closed
3/12/2010	1:32:52 AM	SiCl4 post valve closed
3/12/2010	1:32:52 AM	Main Vac valve closed
3/12/2010	1:32:52 AM	Bypass valve closed
3/12/2010	1:32:52 AM	H2 valve opened
3/12/2010	1:32:52 AM	Bubbler valve opened
3/12/2010	1:32:52 AM	Helium MFC set to  0.000000
3/12/2010	1:32:52 AM	H2 MFC set to  500.000000
3/12/2010	1:32:52 AM	BCl3 MFC set to  0.000000
3/12/2010	1:32:52 AM	SiCl4 MFC set to  0.000000
3/12/2010	1:32:52 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:32:52 AM	Tube furnace set to 0
3/12/2010	1:52:52 AM	Helium valve closed
3/12/2010	1:52:52 AM	PH3 valve closed
3/12/2010	1:52:52 AM	Main Vac valve closed
3/12/2010	1:52:52 AM	Bypass valve closed
3/12/2010	1:52:52 AM	H2 valve opened
3/12/2010	1:52:52 AM	BCl3 valve opened
3/12/2010	1:52:52 AM	SiCl4 pre valve opened
3/12/2010	1:52:52 AM	SiCl4 post valve opened
3/12/2010	1:52:52 AM	Bubbler valve opened
3/12/2010	1:52:52 AM	Helium MFC set to  0.000000
3/12/2010	1:52:52 AM	H2 MFC set to  500.000000
3/12/2010	1:52:52 AM	BCl3 MFC set to  35.000000
3/12/2010	1:52:52 AM	SiCl4 MFC set to  325.000000
3/12/2010	1:52:52 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:52:52 AM	Tube furnace set to 0
3/12/2010	2:12:53 AM	Helium valve closed
3/12/2010	2:12:53 AM	BCl3 valve closed
3/12/2010	2:12:53 AM	PH3 valve closed
3/12/2010	2:12:53 AM	SiCl4 pre valve closed
3/12/2010	2:12:53 AM	SiCl4 post valve closed
3/12/2010	2:12:53 AM	Main Vac valve closed
3/12/2010	2:12:53 AM	Bypass valve closed
3/12/2010	2:12:53 AM	H2 valve opened
3/12/2010	2:12:53 AM	Bubbler valve opened
3/12/2010	2:12:53 AM	Helium MFC set to  0.000000
3/12/2010	2:12:53 AM	H2 MFC set to  500.000000
3/12/2010	2:12:53 AM	BCl3 MFC set to  0.000000
3/12/2010	2:12:53 AM	SiCl4 MFC set to  0.000000
3/12/2010	2:12:53 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:12:53 AM	Tube furnace set to 0
3/12/2010	2:32:53 AM	H2 valve closed
3/12/2010	2:32:53 AM	BCl3 valve closed
3/12/2010	2:32:53 AM	PH3 valve closed
3/12/2010	2:32:53 AM	SiCl4 pre valve closed
3/12/2010	2:32:53 AM	SiCl4 post valve closed
3/12/2010	2:32:53 AM	Main Vac valve closed
3/12/2010	2:32:53 AM	Bypass valve closed
3/12/2010	2:32:53 AM	Helium valve opened
3/12/2010	2:32:53 AM	Bubbler valve opened
3/12/2010	2:32:53 AM	Helium MFC set to  500.000000
3/12/2010	2:32:53 AM	H2 MFC set to  0.000000
3/12/2010	2:32:53 AM	BCl3 MFC set to  0.000000
3/12/2010	2:32:53 AM	SiCl4 MFC set to  0.000000
3/12/2010	2:32:53 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:32:53 AM	Tube furnace set to 0
3/12/2010	2:52:53 AM	Helium valve closed
3/12/2010	2:52:53 AM	H2 valve closed
3/12/2010	2:52:53 AM	BCl3 valve closed
3/12/2010	2:52:53 AM	PH3 valve closed
3/12/2010	2:52:53 AM	SiCl4 pre valve closed
3/12/2010	2:52:53 AM	SiCl4 post valve closed
3/12/2010	2:52:53 AM	Main Vac valve closed
3/12/2010	2:52:53 AM	Bypass valve closed
3/12/2010	2:52:53 AM	Bubbler valve closed
3/12/2010	2:52:53 AM	Helium MFC set to  0.000000
3/12/2010	2:52:53 AM	H2 MFC set to  0.000000
3/12/2010	2:52:53 AM	BCl3 MFC set to  0.000000
3/12/2010	2:52:53 AM	SiCl4 MFC set to  0.000000
3/12/2010	2:52:53 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:52:53 AM	Tube furnace set to 0
3/12/2010	2:52:53 AM	Run finished at 2:52 AM
3/12/2010	3:10:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:10:02 AM	Recipe started at 3:10 AM
3/12/2010	3:10:02 AM	Helium valve closed
3/12/2010	3:10:02 AM	H2 valve closed
3/12/2010	3:10:02 AM	BCl3 valve closed
3/12/2010	3:10:02 AM	PH3 valve closed
3/12/2010	3:10:02 AM	SiCl4 pre valve closed
3/12/2010	3:10:02 AM	SiCl4 post valve closed
3/12/2010	3:10:02 AM	Main Vac valve closed
3/12/2010	3:10:02 AM	Bubbler valve closed
3/12/2010	3:10:02 AM	Bypass valve opened
3/12/2010	3:10:02 AM	Helium MFC set to  0.000000
3/12/2010	3:10:02 AM	H2 MFC set to  0.000000
3/12/2010	3:10:02 AM	BCl3 MFC set to  0.000000
3/12/2010	3:10:02 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:10:02 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:10:02 AM	Tube furnace set to 0
3/12/2010	3:10:33 AM	Helium valve closed
3/12/2010	3:10:33 AM	H2 valve closed
3/12/2010	3:10:33 AM	BCl3 valve closed
3/12/2010	3:10:33 AM	PH3 valve closed
3/12/2010	3:10:33 AM	SiCl4 pre valve closed
3/12/2010	3:10:33 AM	SiCl4 post valve closed
3/12/2010	3:10:33 AM	Bubbler valve closed
3/12/2010	3:10:33 AM	Main Vac valve opened
3/12/2010	3:10:33 AM	Bypass valve opened
3/12/2010	3:10:33 AM	Helium MFC set to  0.000000
3/12/2010	3:10:33 AM	H2 MFC set to  0.000000
3/12/2010	3:10:33 AM	BCl3 MFC set to  0.000000
3/12/2010	3:10:33 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:10:33 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:10:33 AM	Tube furnace set to 0
3/12/2010	3:10:33 AM	Run finished at 3:10 AM
3/12/2010	3:10:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:11:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	3:11:57 AM	Recipe started at 3:11 AM
3/12/2010	3:11:57 AM	H2 valve closed
3/12/2010	3:11:57 AM	BCl3 valve closed
3/12/2010	3:11:57 AM	PH3 valve closed
3/12/2010	3:11:57 AM	SiCl4 pre valve closed
3/12/2010	3:11:57 AM	SiCl4 post valve closed
3/12/2010	3:11:57 AM	Main Vac valve closed
3/12/2010	3:11:57 AM	Bypass valve closed
3/12/2010	3:11:57 AM	Bubbler valve closed
3/12/2010	3:11:57 AM	Helium valve opened
3/12/2010	3:11:57 AM	Helium MFC set to  500.000000
3/12/2010	3:11:57 AM	H2 MFC set to  0.000000
3/12/2010	3:11:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:11:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:11:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:11:57 AM	Tube furnace set to 0
3/12/2010	3:13:20 AM	Helium valve closed
3/12/2010	3:13:20 AM	H2 valve closed
3/12/2010	3:13:20 AM	BCl3 valve closed
3/12/2010	3:13:20 AM	PH3 valve closed
3/12/2010	3:13:20 AM	SiCl4 pre valve closed
3/12/2010	3:13:20 AM	SiCl4 post valve closed
3/12/2010	3:13:20 AM	Main Vac valve closed
3/12/2010	3:13:20 AM	Bypass valve closed
3/12/2010	3:13:20 AM	Bubbler valve closed
3/12/2010	3:13:20 AM	Helium MFC set to  0.000000
3/12/2010	3:13:20 AM	H2 MFC set to  0.000000
3/12/2010	3:13:20 AM	BCl3 MFC set to  0.000000
3/12/2010	3:13:20 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:13:20 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:13:20 AM	Tube furnace set to 0
3/12/2010	3:13:35 AM	Helium valve closed
3/12/2010	3:13:35 AM	H2 valve closed
3/12/2010	3:13:35 AM	BCl3 valve closed
3/12/2010	3:13:35 AM	PH3 valve closed
3/12/2010	3:13:35 AM	SiCl4 pre valve closed
3/12/2010	3:13:35 AM	SiCl4 post valve closed
3/12/2010	3:13:35 AM	Main Vac valve closed
3/12/2010	3:13:35 AM	Bubbler valve closed
3/12/2010	3:13:35 AM	Bypass valve opened
3/12/2010	3:13:35 AM	Helium MFC set to  0.000000
3/12/2010	3:13:35 AM	H2 MFC set to  0.000000
3/12/2010	3:13:35 AM	BCl3 MFC set to  0.000000
3/12/2010	3:13:35 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:13:35 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:13:35 AM	Tube furnace set to 0
3/12/2010	3:13:57 AM	Helium valve closed
3/12/2010	3:13:57 AM	H2 valve closed
3/12/2010	3:13:57 AM	BCl3 valve closed
3/12/2010	3:13:57 AM	PH3 valve closed
3/12/2010	3:13:57 AM	SiCl4 pre valve closed
3/12/2010	3:13:57 AM	SiCl4 post valve closed
3/12/2010	3:13:57 AM	Bubbler valve closed
3/12/2010	3:13:57 AM	Main Vac valve opened
3/12/2010	3:13:57 AM	Bypass valve opened
3/12/2010	3:13:57 AM	Helium MFC set to  0.000000
3/12/2010	3:13:57 AM	H2 MFC set to  0.000000
3/12/2010	3:13:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:13:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:13:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:13:57 AM	Tube furnace set to 0
3/12/2010	3:18:57 AM	H2 valve closed
3/12/2010	3:18:57 AM	BCl3 valve closed
3/12/2010	3:18:57 AM	PH3 valve closed
3/12/2010	3:18:57 AM	SiCl4 pre valve closed
3/12/2010	3:18:57 AM	SiCl4 post valve closed
3/12/2010	3:18:57 AM	Main Vac valve closed
3/12/2010	3:18:57 AM	Bypass valve closed
3/12/2010	3:18:57 AM	Bubbler valve closed
3/12/2010	3:18:57 AM	Helium valve opened
3/12/2010	3:18:57 AM	Helium MFC set to  500.000000
3/12/2010	3:18:57 AM	H2 MFC set to  0.000000
3/12/2010	3:18:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:18:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:18:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:18:57 AM	Tube furnace set to 0
3/12/2010	3:20:19 AM	Helium valve closed
3/12/2010	3:20:19 AM	H2 valve closed
3/12/2010	3:20:19 AM	BCl3 valve closed
3/12/2010	3:20:19 AM	PH3 valve closed
3/12/2010	3:20:19 AM	SiCl4 pre valve closed
3/12/2010	3:20:19 AM	SiCl4 post valve closed
3/12/2010	3:20:19 AM	Main Vac valve closed
3/12/2010	3:20:19 AM	Bypass valve closed
3/12/2010	3:20:19 AM	Bubbler valve closed
3/12/2010	3:20:19 AM	Helium MFC set to  0.000000
3/12/2010	3:20:19 AM	H2 MFC set to  0.000000
3/12/2010	3:20:19 AM	BCl3 MFC set to  0.000000
3/12/2010	3:20:19 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:20:19 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:20:19 AM	Tube furnace set to 0
3/12/2010	3:20:35 AM	Helium valve closed
3/12/2010	3:20:35 AM	H2 valve closed
3/12/2010	3:20:35 AM	BCl3 valve closed
3/12/2010	3:20:35 AM	PH3 valve closed
3/12/2010	3:20:35 AM	SiCl4 pre valve closed
3/12/2010	3:20:35 AM	SiCl4 post valve closed
3/12/2010	3:20:35 AM	Main Vac valve closed
3/12/2010	3:20:35 AM	Bubbler valve closed
3/12/2010	3:20:35 AM	Bypass valve opened
3/12/2010	3:20:35 AM	Helium MFC set to  0.000000
3/12/2010	3:20:35 AM	H2 MFC set to  0.000000
3/12/2010	3:20:35 AM	BCl3 MFC set to  0.000000
3/12/2010	3:20:35 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:20:35 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:20:35 AM	Tube furnace set to 0
3/12/2010	3:20:57 AM	Helium valve closed
3/12/2010	3:20:57 AM	H2 valve closed
3/12/2010	3:20:57 AM	BCl3 valve closed
3/12/2010	3:20:57 AM	PH3 valve closed
3/12/2010	3:20:57 AM	SiCl4 pre valve closed
3/12/2010	3:20:57 AM	SiCl4 post valve closed
3/12/2010	3:20:57 AM	Bubbler valve closed
3/12/2010	3:20:57 AM	Main Vac valve opened
3/12/2010	3:20:57 AM	Bypass valve opened
3/12/2010	3:20:57 AM	Helium MFC set to  0.000000
3/12/2010	3:20:57 AM	H2 MFC set to  0.000000
3/12/2010	3:20:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:20:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:20:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:20:57 AM	Tube furnace set to 0
3/12/2010	3:25:57 AM	H2 valve closed
3/12/2010	3:25:57 AM	BCl3 valve closed
3/12/2010	3:25:57 AM	PH3 valve closed
3/12/2010	3:25:57 AM	SiCl4 pre valve closed
3/12/2010	3:25:57 AM	SiCl4 post valve closed
3/12/2010	3:25:57 AM	Main Vac valve closed
3/12/2010	3:25:57 AM	Bypass valve closed
3/12/2010	3:25:57 AM	Bubbler valve closed
3/12/2010	3:25:57 AM	Helium valve opened
3/12/2010	3:25:57 AM	Helium MFC set to  500.000000
3/12/2010	3:25:57 AM	H2 MFC set to  0.000000
3/12/2010	3:25:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:25:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:25:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:25:57 AM	Tube furnace set to 0
3/12/2010	3:27:20 AM	Helium valve closed
3/12/2010	3:27:20 AM	H2 valve closed
3/12/2010	3:27:20 AM	BCl3 valve closed
3/12/2010	3:27:20 AM	PH3 valve closed
3/12/2010	3:27:20 AM	SiCl4 pre valve closed
3/12/2010	3:27:20 AM	SiCl4 post valve closed
3/12/2010	3:27:20 AM	Main Vac valve closed
3/12/2010	3:27:20 AM	Bypass valve closed
3/12/2010	3:27:20 AM	Bubbler valve closed
3/12/2010	3:27:20 AM	Helium MFC set to  0.000000
3/12/2010	3:27:20 AM	H2 MFC set to  0.000000
3/12/2010	3:27:20 AM	BCl3 MFC set to  0.000000
3/12/2010	3:27:20 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:27:20 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:27:20 AM	Tube furnace set to 0
3/12/2010	3:27:35 AM	Helium valve closed
3/12/2010	3:27:35 AM	H2 valve closed
3/12/2010	3:27:35 AM	BCl3 valve closed
3/12/2010	3:27:35 AM	PH3 valve closed
3/12/2010	3:27:35 AM	SiCl4 pre valve closed
3/12/2010	3:27:35 AM	SiCl4 post valve closed
3/12/2010	3:27:35 AM	Main Vac valve closed
3/12/2010	3:27:35 AM	Bubbler valve closed
3/12/2010	3:27:35 AM	Bypass valve opened
3/12/2010	3:27:35 AM	Helium MFC set to  0.000000
3/12/2010	3:27:35 AM	H2 MFC set to  0.000000
3/12/2010	3:27:35 AM	BCl3 MFC set to  0.000000
3/12/2010	3:27:35 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:27:35 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:27:35 AM	Tube furnace set to 0
3/12/2010	3:27:57 AM	Helium valve closed
3/12/2010	3:27:57 AM	H2 valve closed
3/12/2010	3:27:57 AM	BCl3 valve closed
3/12/2010	3:27:57 AM	PH3 valve closed
3/12/2010	3:27:57 AM	SiCl4 pre valve closed
3/12/2010	3:27:57 AM	SiCl4 post valve closed
3/12/2010	3:27:57 AM	Bubbler valve closed
3/12/2010	3:27:57 AM	Main Vac valve opened
3/12/2010	3:27:57 AM	Bypass valve opened
3/12/2010	3:27:57 AM	Helium MFC set to  0.000000
3/12/2010	3:27:57 AM	H2 MFC set to  0.000000
3/12/2010	3:27:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:27:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:27:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:27:57 AM	Tube furnace set to 0
3/12/2010	3:32:57 AM	Helium valve closed
3/12/2010	3:32:57 AM	H2 valve closed
3/12/2010	3:32:57 AM	BCl3 valve closed
3/12/2010	3:32:57 AM	PH3 valve closed
3/12/2010	3:32:57 AM	SiCl4 pre valve closed
3/12/2010	3:32:57 AM	SiCl4 post valve closed
3/12/2010	3:32:57 AM	Bubbler valve closed
3/12/2010	3:32:57 AM	Main Vac valve opened
3/12/2010	3:32:57 AM	Bypass valve opened
3/12/2010	3:32:57 AM	Helium MFC set to  0.000000
3/12/2010	3:32:57 AM	H2 MFC set to  0.000000
3/12/2010	3:32:57 AM	BCl3 MFC set to  0.000000
3/12/2010	3:32:57 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:32:57 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:32:57 AM	Tube furnace set to 0
3/12/2010	3:32:59 AM	Run finished at 3:32 AM
3/12/2010	3:32:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	3:41:19 AM	Bypass valve closed
3/12/2010	3:41:20 AM	Main Vac valve closed
3/12/2010	3:41:41 AM	Bypass valve opened
3/12/2010	3:41:42 AM	Main Vac valve opened
3/12/2010	3:42:26 AM	Recipe started at 3:42 AM
3/12/2010	3:42:26 AM	Helium valve closed
3/12/2010	3:42:26 AM	BCl3 valve closed
3/12/2010	3:42:26 AM	PH3 valve closed
3/12/2010	3:42:26 AM	SiCl4 pre valve closed
3/12/2010	3:42:26 AM	SiCl4 post valve closed
3/12/2010	3:42:26 AM	Main Vac valve closed
3/12/2010	3:42:26 AM	Bypass valve closed
3/12/2010	3:42:26 AM	Bubbler valve closed
3/12/2010	3:42:26 AM	H2 valve opened
3/12/2010	3:42:26 AM	Helium MFC set to  0.000000
3/12/2010	3:42:26 AM	H2 MFC set to  500.000000
3/12/2010	3:42:26 AM	BCl3 MFC set to  0.000000
3/12/2010	3:42:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:42:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:42:26 AM	Tube furnace set to 0
3/12/2010	3:43:49 AM	Helium valve closed
3/12/2010	3:43:49 AM	BCl3 valve closed
3/12/2010	3:43:49 AM	PH3 valve closed
3/12/2010	3:43:49 AM	SiCl4 pre valve closed
3/12/2010	3:43:49 AM	SiCl4 post valve closed
3/12/2010	3:43:49 AM	Main Vac valve closed
3/12/2010	3:43:49 AM	Bypass valve closed
3/12/2010	3:43:49 AM	H2 valve opened
3/12/2010	3:43:49 AM	Bubbler valve opened
3/12/2010	3:43:49 AM	Helium MFC set to  0.000000
3/12/2010	3:43:49 AM	H2 MFC set to  500.000000
3/12/2010	3:43:49 AM	BCl3 MFC set to  0.000000
3/12/2010	3:43:49 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:43:49 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:43:49 AM	Tube furnace set to 0
3/12/2010	3:46:49 AM	Run aborted at 3:46 AM
3/12/2010	3:46:49 AM	Helium valve closed
3/12/2010	3:46:49 AM	H2 valve closed
3/12/2010	3:46:49 AM	BCl3 valve closed
3/12/2010	3:46:49 AM	PH3 valve closed
3/12/2010	3:46:49 AM	SiCl4 pre valve closed
3/12/2010	3:46:49 AM	SiCl4 post valve closed
3/12/2010	3:46:49 AM	Bypass valve closed
3/12/2010	3:46:49 AM	Main Vac valve closed
3/12/2010	3:46:49 AM	Bubbler valve closed
3/12/2010	3:46:49 AM	Helium MFC set to  0.000000
3/12/2010	3:46:49 AM	H2 MFC set to  0.000000
3/12/2010	3:46:49 AM	BCl3 MFC set to  0.000000
3/12/2010	3:46:49 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:46:49 AM	Tube furnace set to 0
3/12/2010	3:46:52 AM	Recipe started at 3:46 AM
3/12/2010	3:46:52 AM	Helium valve closed
3/12/2010	3:46:52 AM	BCl3 valve closed
3/12/2010	3:46:52 AM	PH3 valve closed
3/12/2010	3:46:52 AM	SiCl4 pre valve closed
3/12/2010	3:46:52 AM	SiCl4 post valve closed
3/12/2010	3:46:52 AM	Main Vac valve closed
3/12/2010	3:46:52 AM	Bypass valve closed
3/12/2010	3:46:52 AM	Bubbler valve closed
3/12/2010	3:46:52 AM	H2 valve opened
3/12/2010	3:46:52 AM	Helium MFC set to  0.000000
3/12/2010	3:46:52 AM	H2 MFC set to  500.000000
3/12/2010	3:46:52 AM	BCl3 MFC set to  0.000000
3/12/2010	3:46:52 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:46:52 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:46:52 AM	Tube furnace set to 0
3/12/2010	3:46:53 AM	Helium valve closed
3/12/2010	3:46:53 AM	BCl3 valve closed
3/12/2010	3:46:53 AM	PH3 valve closed
3/12/2010	3:46:53 AM	SiCl4 pre valve closed
3/12/2010	3:46:53 AM	SiCl4 post valve closed
3/12/2010	3:46:53 AM	Main Vac valve closed
3/12/2010	3:46:53 AM	Bypass valve closed
3/12/2010	3:46:53 AM	H2 valve opened
3/12/2010	3:46:53 AM	Bubbler valve opened
3/12/2010	3:46:53 AM	Helium MFC set to  0.000000
3/12/2010	3:46:53 AM	H2 MFC set to  500.000000
3/12/2010	3:46:53 AM	BCl3 MFC set to  0.000000
3/12/2010	3:46:53 AM	SiCl4 MFC set to  0.000000
3/12/2010	3:46:53 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:46:53 AM	Tube furnace set to 0
3/12/2010	4:06:54 AM	Helium valve closed
3/12/2010	4:06:54 AM	PH3 valve closed
3/12/2010	4:06:54 AM	Main Vac valve closed
3/12/2010	4:06:54 AM	Bypass valve closed
3/12/2010	4:06:54 AM	H2 valve opened
3/12/2010	4:06:54 AM	BCl3 valve opened
3/12/2010	4:06:54 AM	SiCl4 pre valve opened
3/12/2010	4:06:54 AM	SiCl4 post valve opened
3/12/2010	4:06:54 AM	Bubbler valve opened
3/12/2010	4:06:54 AM	Helium MFC set to  0.000000
3/12/2010	4:06:54 AM	H2 MFC set to  500.000000
3/12/2010	4:06:54 AM	BCl3 MFC set to  35.000000
3/12/2010	4:06:54 AM	SiCl4 MFC set to  325.000000
3/12/2010	4:06:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:06:54 AM	Tube furnace set to 0
3/12/2010	4:21:54 AM	Helium valve closed
3/12/2010	4:21:54 AM	BCl3 valve closed
3/12/2010	4:21:54 AM	PH3 valve closed
3/12/2010	4:21:54 AM	SiCl4 pre valve closed
3/12/2010	4:21:54 AM	SiCl4 post valve closed
3/12/2010	4:21:54 AM	Main Vac valve closed
3/12/2010	4:21:54 AM	Bypass valve closed
3/12/2010	4:21:54 AM	H2 valve opened
3/12/2010	4:21:54 AM	Bubbler valve opened
3/12/2010	4:21:54 AM	Helium MFC set to  0.000000
3/12/2010	4:21:54 AM	H2 MFC set to  500.000000
3/12/2010	4:21:54 AM	BCl3 MFC set to  0.000000
3/12/2010	4:21:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	4:21:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:21:54 AM	Tube furnace set to 0
3/12/2010	4:41:54 AM	H2 valve closed
3/12/2010	4:41:54 AM	BCl3 valve closed
3/12/2010	4:41:54 AM	PH3 valve closed
3/12/2010	4:41:54 AM	SiCl4 pre valve closed
3/12/2010	4:41:54 AM	SiCl4 post valve closed
3/12/2010	4:41:54 AM	Main Vac valve closed
3/12/2010	4:41:54 AM	Bypass valve closed
3/12/2010	4:41:54 AM	Helium valve opened
3/12/2010	4:41:54 AM	Bubbler valve opened
3/12/2010	4:41:54 AM	Helium MFC set to  500.000000
3/12/2010	4:41:54 AM	H2 MFC set to  0.000000
3/12/2010	4:41:54 AM	BCl3 MFC set to  0.000000
3/12/2010	4:41:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	4:41:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:41:54 AM	Tube furnace set to 0
3/12/2010	5:01:54 AM	Helium valve closed
3/12/2010	5:01:54 AM	H2 valve closed
3/12/2010	5:01:54 AM	BCl3 valve closed
3/12/2010	5:01:54 AM	PH3 valve closed
3/12/2010	5:01:54 AM	SiCl4 pre valve closed
3/12/2010	5:01:54 AM	SiCl4 post valve closed
3/12/2010	5:01:54 AM	Main Vac valve closed
3/12/2010	5:01:54 AM	Bypass valve closed
3/12/2010	5:01:54 AM	Bubbler valve closed
3/12/2010	5:01:54 AM	Helium MFC set to  0.000000
3/12/2010	5:01:54 AM	H2 MFC set to  0.000000
3/12/2010	5:01:54 AM	BCl3 MFC set to  0.000000
3/12/2010	5:01:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:01:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:01:54 AM	Tube furnace set to 0
3/12/2010	5:01:55 AM	Run finished at 5:01 AM
3/12/2010	5:36:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	5:36:13 AM	Recipe started at 5:36 AM
3/12/2010	5:36:13 AM	Helium valve closed
3/12/2010	5:36:13 AM	H2 valve closed
3/12/2010	5:36:13 AM	BCl3 valve closed
3/12/2010	5:36:13 AM	PH3 valve closed
3/12/2010	5:36:13 AM	SiCl4 pre valve closed
3/12/2010	5:36:13 AM	SiCl4 post valve closed
3/12/2010	5:36:13 AM	Main Vac valve closed
3/12/2010	5:36:13 AM	Bubbler valve closed
3/12/2010	5:36:13 AM	Bypass valve opened
3/12/2010	5:36:13 AM	Helium MFC set to  0.000000
3/12/2010	5:36:13 AM	H2 MFC set to  0.000000
3/12/2010	5:36:13 AM	BCl3 MFC set to  0.000000
3/12/2010	5:36:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:36:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:36:13 AM	Tube furnace set to 0
3/12/2010	5:36:45 AM	Helium valve closed
3/12/2010	5:36:45 AM	H2 valve closed
3/12/2010	5:36:45 AM	BCl3 valve closed
3/12/2010	5:36:45 AM	PH3 valve closed
3/12/2010	5:36:45 AM	SiCl4 pre valve closed
3/12/2010	5:36:45 AM	SiCl4 post valve closed
3/12/2010	5:36:45 AM	Bubbler valve closed
3/12/2010	5:36:45 AM	Main Vac valve opened
3/12/2010	5:36:45 AM	Bypass valve opened
3/12/2010	5:36:45 AM	Helium MFC set to  0.000000
3/12/2010	5:36:45 AM	H2 MFC set to  0.000000
3/12/2010	5:36:45 AM	BCl3 MFC set to  0.000000
3/12/2010	5:36:45 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:36:45 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:36:45 AM	Tube furnace set to 0
3/12/2010	5:36:45 AM	Run finished at 5:36 AM
3/12/2010	5:36:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	5:37:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	5:37:16 AM	Recipe started at 5:37 AM
3/12/2010	5:37:16 AM	H2 valve closed
3/12/2010	5:37:16 AM	BCl3 valve closed
3/12/2010	5:37:16 AM	PH3 valve closed
3/12/2010	5:37:16 AM	SiCl4 pre valve closed
3/12/2010	5:37:16 AM	SiCl4 post valve closed
3/12/2010	5:37:16 AM	Main Vac valve closed
3/12/2010	5:37:16 AM	Bypass valve closed
3/12/2010	5:37:16 AM	Bubbler valve closed
3/12/2010	5:37:16 AM	Helium valve opened
3/12/2010	5:37:16 AM	Helium MFC set to  500.000000
3/12/2010	5:37:16 AM	H2 MFC set to  0.000000
3/12/2010	5:37:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:37:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:37:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:37:16 AM	Tube furnace set to 0
3/12/2010	5:38:38 AM	Helium valve closed
3/12/2010	5:38:38 AM	H2 valve closed
3/12/2010	5:38:38 AM	BCl3 valve closed
3/12/2010	5:38:38 AM	PH3 valve closed
3/12/2010	5:38:38 AM	SiCl4 pre valve closed
3/12/2010	5:38:38 AM	SiCl4 post valve closed
3/12/2010	5:38:38 AM	Main Vac valve closed
3/12/2010	5:38:38 AM	Bypass valve closed
3/12/2010	5:38:38 AM	Bubbler valve closed
3/12/2010	5:38:38 AM	Helium MFC set to  0.000000
3/12/2010	5:38:38 AM	H2 MFC set to  0.000000
3/12/2010	5:38:38 AM	BCl3 MFC set to  0.000000
3/12/2010	5:38:38 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:38:38 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:38:38 AM	Tube furnace set to 0
3/12/2010	5:38:54 AM	Helium valve closed
3/12/2010	5:38:54 AM	H2 valve closed
3/12/2010	5:38:54 AM	BCl3 valve closed
3/12/2010	5:38:54 AM	PH3 valve closed
3/12/2010	5:38:54 AM	SiCl4 pre valve closed
3/12/2010	5:38:54 AM	SiCl4 post valve closed
3/12/2010	5:38:54 AM	Main Vac valve closed
3/12/2010	5:38:54 AM	Bubbler valve closed
3/12/2010	5:38:54 AM	Bypass valve opened
3/12/2010	5:38:54 AM	Helium MFC set to  0.000000
3/12/2010	5:38:54 AM	H2 MFC set to  0.000000
3/12/2010	5:38:54 AM	BCl3 MFC set to  0.000000
3/12/2010	5:38:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:38:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:38:54 AM	Tube furnace set to 0
3/12/2010	5:39:16 AM	Helium valve closed
3/12/2010	5:39:16 AM	H2 valve closed
3/12/2010	5:39:16 AM	BCl3 valve closed
3/12/2010	5:39:16 AM	PH3 valve closed
3/12/2010	5:39:16 AM	SiCl4 pre valve closed
3/12/2010	5:39:16 AM	SiCl4 post valve closed
3/12/2010	5:39:16 AM	Bubbler valve closed
3/12/2010	5:39:16 AM	Main Vac valve opened
3/12/2010	5:39:16 AM	Bypass valve opened
3/12/2010	5:39:16 AM	Helium MFC set to  0.000000
3/12/2010	5:39:16 AM	H2 MFC set to  0.000000
3/12/2010	5:39:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:39:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:39:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:39:16 AM	Tube furnace set to 0
3/12/2010	5:44:16 AM	H2 valve closed
3/12/2010	5:44:16 AM	BCl3 valve closed
3/12/2010	5:44:16 AM	PH3 valve closed
3/12/2010	5:44:16 AM	SiCl4 pre valve closed
3/12/2010	5:44:16 AM	SiCl4 post valve closed
3/12/2010	5:44:16 AM	Main Vac valve closed
3/12/2010	5:44:16 AM	Bypass valve closed
3/12/2010	5:44:16 AM	Bubbler valve closed
3/12/2010	5:44:16 AM	Helium valve opened
3/12/2010	5:44:16 AM	Helium MFC set to  500.000000
3/12/2010	5:44:16 AM	H2 MFC set to  0.000000
3/12/2010	5:44:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:44:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:44:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:44:16 AM	Tube furnace set to 0
3/12/2010	5:45:38 AM	Helium valve closed
3/12/2010	5:45:38 AM	H2 valve closed
3/12/2010	5:45:38 AM	BCl3 valve closed
3/12/2010	5:45:38 AM	PH3 valve closed
3/12/2010	5:45:38 AM	SiCl4 pre valve closed
3/12/2010	5:45:38 AM	SiCl4 post valve closed
3/12/2010	5:45:38 AM	Main Vac valve closed
3/12/2010	5:45:38 AM	Bypass valve closed
3/12/2010	5:45:38 AM	Bubbler valve closed
3/12/2010	5:45:38 AM	Helium MFC set to  0.000000
3/12/2010	5:45:38 AM	H2 MFC set to  0.000000
3/12/2010	5:45:38 AM	BCl3 MFC set to  0.000000
3/12/2010	5:45:38 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:45:38 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:45:38 AM	Tube furnace set to 0
3/12/2010	5:45:54 AM	Helium valve closed
3/12/2010	5:45:54 AM	H2 valve closed
3/12/2010	5:45:54 AM	BCl3 valve closed
3/12/2010	5:45:54 AM	PH3 valve closed
3/12/2010	5:45:54 AM	SiCl4 pre valve closed
3/12/2010	5:45:54 AM	SiCl4 post valve closed
3/12/2010	5:45:54 AM	Main Vac valve closed
3/12/2010	5:45:54 AM	Bubbler valve closed
3/12/2010	5:45:54 AM	Bypass valve opened
3/12/2010	5:45:54 AM	Helium MFC set to  0.000000
3/12/2010	5:45:54 AM	H2 MFC set to  0.000000
3/12/2010	5:45:54 AM	BCl3 MFC set to  0.000000
3/12/2010	5:45:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:45:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:45:54 AM	Tube furnace set to 0
3/12/2010	5:46:16 AM	Helium valve closed
3/12/2010	5:46:16 AM	H2 valve closed
3/12/2010	5:46:16 AM	BCl3 valve closed
3/12/2010	5:46:16 AM	PH3 valve closed
3/12/2010	5:46:16 AM	SiCl4 pre valve closed
3/12/2010	5:46:16 AM	SiCl4 post valve closed
3/12/2010	5:46:16 AM	Bubbler valve closed
3/12/2010	5:46:16 AM	Main Vac valve opened
3/12/2010	5:46:16 AM	Bypass valve opened
3/12/2010	5:46:16 AM	Helium MFC set to  0.000000
3/12/2010	5:46:16 AM	H2 MFC set to  0.000000
3/12/2010	5:46:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:46:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:46:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:46:16 AM	Tube furnace set to 0
3/12/2010	5:51:16 AM	H2 valve closed
3/12/2010	5:51:16 AM	BCl3 valve closed
3/12/2010	5:51:16 AM	PH3 valve closed
3/12/2010	5:51:16 AM	SiCl4 pre valve closed
3/12/2010	5:51:16 AM	SiCl4 post valve closed
3/12/2010	5:51:16 AM	Main Vac valve closed
3/12/2010	5:51:16 AM	Bypass valve closed
3/12/2010	5:51:16 AM	Bubbler valve closed
3/12/2010	5:51:16 AM	Helium valve opened
3/12/2010	5:51:16 AM	Helium MFC set to  500.000000
3/12/2010	5:51:16 AM	H2 MFC set to  0.000000
3/12/2010	5:51:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:51:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:51:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:51:16 AM	Tube furnace set to 0
3/12/2010	5:52:39 AM	Helium valve closed
3/12/2010	5:52:39 AM	H2 valve closed
3/12/2010	5:52:39 AM	BCl3 valve closed
3/12/2010	5:52:39 AM	PH3 valve closed
3/12/2010	5:52:39 AM	SiCl4 pre valve closed
3/12/2010	5:52:39 AM	SiCl4 post valve closed
3/12/2010	5:52:39 AM	Main Vac valve closed
3/12/2010	5:52:39 AM	Bypass valve closed
3/12/2010	5:52:39 AM	Bubbler valve closed
3/12/2010	5:52:39 AM	Helium MFC set to  0.000000
3/12/2010	5:52:39 AM	H2 MFC set to  0.000000
3/12/2010	5:52:39 AM	BCl3 MFC set to  0.000000
3/12/2010	5:52:39 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:52:39 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:52:39 AM	Tube furnace set to 0
3/12/2010	5:52:54 AM	Helium valve closed
3/12/2010	5:52:54 AM	H2 valve closed
3/12/2010	5:52:54 AM	BCl3 valve closed
3/12/2010	5:52:54 AM	PH3 valve closed
3/12/2010	5:52:54 AM	SiCl4 pre valve closed
3/12/2010	5:52:54 AM	SiCl4 post valve closed
3/12/2010	5:52:54 AM	Main Vac valve closed
3/12/2010	5:52:54 AM	Bubbler valve closed
3/12/2010	5:52:54 AM	Bypass valve opened
3/12/2010	5:52:54 AM	Helium MFC set to  0.000000
3/12/2010	5:52:54 AM	H2 MFC set to  0.000000
3/12/2010	5:52:54 AM	BCl3 MFC set to  0.000000
3/12/2010	5:52:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:52:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:52:54 AM	Tube furnace set to 0
3/12/2010	5:53:16 AM	Helium valve closed
3/12/2010	5:53:16 AM	H2 valve closed
3/12/2010	5:53:16 AM	BCl3 valve closed
3/12/2010	5:53:16 AM	PH3 valve closed
3/12/2010	5:53:16 AM	SiCl4 pre valve closed
3/12/2010	5:53:16 AM	SiCl4 post valve closed
3/12/2010	5:53:16 AM	Bubbler valve closed
3/12/2010	5:53:16 AM	Main Vac valve opened
3/12/2010	5:53:16 AM	Bypass valve opened
3/12/2010	5:53:16 AM	Helium MFC set to  0.000000
3/12/2010	5:53:16 AM	H2 MFC set to  0.000000
3/12/2010	5:53:16 AM	BCl3 MFC set to  0.000000
3/12/2010	5:53:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:53:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:53:16 AM	Tube furnace set to 0
3/12/2010	5:58:17 AM	Helium valve closed
3/12/2010	5:58:17 AM	H2 valve closed
3/12/2010	5:58:17 AM	BCl3 valve closed
3/12/2010	5:58:17 AM	PH3 valve closed
3/12/2010	5:58:17 AM	SiCl4 pre valve closed
3/12/2010	5:58:17 AM	SiCl4 post valve closed
3/12/2010	5:58:17 AM	Bubbler valve closed
3/12/2010	5:58:17 AM	Main Vac valve opened
3/12/2010	5:58:17 AM	Bypass valve opened
3/12/2010	5:58:17 AM	Helium MFC set to  0.000000
3/12/2010	5:58:17 AM	H2 MFC set to  0.000000
3/12/2010	5:58:17 AM	BCl3 MFC set to  0.000000
3/12/2010	5:58:17 AM	SiCl4 MFC set to  0.000000
3/12/2010	5:58:17 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:58:17 AM	Tube furnace set to 0
3/12/2010	5:58:18 AM	Run finished at 5:58 AM
3/12/2010	5:58:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	6:09:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	6:09:31 AM	Recipe started at 6:09 AM
3/12/2010	6:09:31 AM	H2 valve closed
3/12/2010	6:09:31 AM	BCl3 valve closed
3/12/2010	6:09:31 AM	PH3 valve closed
3/12/2010	6:09:31 AM	SiCl4 pre valve closed
3/12/2010	6:09:31 AM	SiCl4 post valve closed
3/12/2010	6:09:31 AM	Main Vac valve closed
3/12/2010	6:09:31 AM	Bypass valve closed
3/12/2010	6:09:31 AM	Bubbler valve closed
3/12/2010	6:09:31 AM	Helium valve opened
3/12/2010	6:09:31 AM	Helium MFC set to  500.000000
3/12/2010	6:09:31 AM	H2 MFC set to  0.000000
3/12/2010	6:09:31 AM	BCl3 MFC set to  0.000000
3/12/2010	6:09:31 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:09:31 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:09:31 AM	Tube furnace set to 0
3/12/2010	6:10:54 AM	Helium valve closed
3/12/2010	6:10:54 AM	H2 valve closed
3/12/2010	6:10:54 AM	BCl3 valve closed
3/12/2010	6:10:54 AM	PH3 valve closed
3/12/2010	6:10:54 AM	SiCl4 pre valve closed
3/12/2010	6:10:54 AM	SiCl4 post valve closed
3/12/2010	6:10:54 AM	Main Vac valve closed
3/12/2010	6:10:54 AM	Bypass valve closed
3/12/2010	6:10:54 AM	Bubbler valve closed
3/12/2010	6:10:54 AM	Helium MFC set to  0.000000
3/12/2010	6:10:54 AM	H2 MFC set to  0.000000
3/12/2010	6:10:54 AM	BCl3 MFC set to  0.000000
3/12/2010	6:10:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:10:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:10:54 AM	Tube furnace set to 0
3/12/2010	6:11:09 AM	Helium valve closed
3/12/2010	6:11:09 AM	H2 valve closed
3/12/2010	6:11:09 AM	BCl3 valve closed
3/12/2010	6:11:09 AM	PH3 valve closed
3/12/2010	6:11:09 AM	SiCl4 pre valve closed
3/12/2010	6:11:09 AM	SiCl4 post valve closed
3/12/2010	6:11:09 AM	Main Vac valve closed
3/12/2010	6:11:09 AM	Bubbler valve closed
3/12/2010	6:11:09 AM	Bypass valve opened
3/12/2010	6:11:09 AM	Helium MFC set to  0.000000
3/12/2010	6:11:09 AM	H2 MFC set to  0.000000
3/12/2010	6:11:09 AM	BCl3 MFC set to  0.000000
3/12/2010	6:11:09 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:11:09 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:11:09 AM	Tube furnace set to 0
3/12/2010	6:11:31 AM	Helium valve closed
3/12/2010	6:11:31 AM	H2 valve closed
3/12/2010	6:11:31 AM	BCl3 valve closed
3/12/2010	6:11:31 AM	PH3 valve closed
3/12/2010	6:11:31 AM	SiCl4 pre valve closed
3/12/2010	6:11:31 AM	SiCl4 post valve closed
3/12/2010	6:11:31 AM	Bubbler valve closed
3/12/2010	6:11:31 AM	Main Vac valve opened
3/12/2010	6:11:31 AM	Bypass valve opened
3/12/2010	6:11:31 AM	Helium MFC set to  0.000000
3/12/2010	6:11:31 AM	H2 MFC set to  0.000000
3/12/2010	6:11:31 AM	BCl3 MFC set to  0.000000
3/12/2010	6:11:31 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:11:31 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:11:31 AM	Tube furnace set to 0
3/12/2010	6:16:31 AM	H2 valve closed
3/12/2010	6:16:31 AM	BCl3 valve closed
3/12/2010	6:16:31 AM	PH3 valve closed
3/12/2010	6:16:31 AM	SiCl4 pre valve closed
3/12/2010	6:16:31 AM	SiCl4 post valve closed
3/12/2010	6:16:31 AM	Main Vac valve closed
3/12/2010	6:16:31 AM	Bypass valve closed
3/12/2010	6:16:31 AM	Bubbler valve closed
3/12/2010	6:16:31 AM	Helium valve opened
3/12/2010	6:16:31 AM	Helium MFC set to  500.000000
3/12/2010	6:16:31 AM	H2 MFC set to  0.000000
3/12/2010	6:16:31 AM	BCl3 MFC set to  0.000000
3/12/2010	6:16:31 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:16:31 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:16:31 AM	Tube furnace set to 0
3/12/2010	6:17:54 AM	Helium valve closed
3/12/2010	6:17:54 AM	H2 valve closed
3/12/2010	6:17:54 AM	BCl3 valve closed
3/12/2010	6:17:54 AM	PH3 valve closed
3/12/2010	6:17:54 AM	SiCl4 pre valve closed
3/12/2010	6:17:54 AM	SiCl4 post valve closed
3/12/2010	6:17:54 AM	Main Vac valve closed
3/12/2010	6:17:54 AM	Bypass valve closed
3/12/2010	6:17:54 AM	Bubbler valve closed
3/12/2010	6:17:54 AM	Helium MFC set to  0.000000
3/12/2010	6:17:54 AM	H2 MFC set to  0.000000
3/12/2010	6:17:54 AM	BCl3 MFC set to  0.000000
3/12/2010	6:17:54 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:17:54 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:17:54 AM	Tube furnace set to 0
3/12/2010	6:18:10 AM	Helium valve closed
3/12/2010	6:18:10 AM	H2 valve closed
3/12/2010	6:18:10 AM	BCl3 valve closed
3/12/2010	6:18:10 AM	PH3 valve closed
3/12/2010	6:18:10 AM	SiCl4 pre valve closed
3/12/2010	6:18:10 AM	SiCl4 post valve closed
3/12/2010	6:18:10 AM	Main Vac valve closed
3/12/2010	6:18:10 AM	Bubbler valve closed
3/12/2010	6:18:10 AM	Bypass valve opened
3/12/2010	6:18:10 AM	Helium MFC set to  0.000000
3/12/2010	6:18:10 AM	H2 MFC set to  0.000000
3/12/2010	6:18:10 AM	BCl3 MFC set to  0.000000
3/12/2010	6:18:10 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:18:10 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:18:10 AM	Tube furnace set to 0
3/12/2010	6:18:32 AM	Helium valve closed
3/12/2010	6:18:32 AM	H2 valve closed
3/12/2010	6:18:32 AM	BCl3 valve closed
3/12/2010	6:18:32 AM	PH3 valve closed
3/12/2010	6:18:32 AM	SiCl4 pre valve closed
3/12/2010	6:18:32 AM	SiCl4 post valve closed
3/12/2010	6:18:32 AM	Bubbler valve closed
3/12/2010	6:18:32 AM	Main Vac valve opened
3/12/2010	6:18:32 AM	Bypass valve opened
3/12/2010	6:18:32 AM	Helium MFC set to  0.000000
3/12/2010	6:18:32 AM	H2 MFC set to  0.000000
3/12/2010	6:18:32 AM	BCl3 MFC set to  0.000000
3/12/2010	6:18:32 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:18:32 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:18:32 AM	Tube furnace set to 0
3/12/2010	6:23:32 AM	H2 valve closed
3/12/2010	6:23:32 AM	BCl3 valve closed
3/12/2010	6:23:32 AM	PH3 valve closed
3/12/2010	6:23:32 AM	SiCl4 pre valve closed
3/12/2010	6:23:32 AM	SiCl4 post valve closed
3/12/2010	6:23:32 AM	Main Vac valve closed
3/12/2010	6:23:32 AM	Bypass valve closed
3/12/2010	6:23:32 AM	Bubbler valve closed
3/12/2010	6:23:32 AM	Helium valve opened
3/12/2010	6:23:32 AM	Helium MFC set to  500.000000
3/12/2010	6:23:32 AM	H2 MFC set to  0.000000
3/12/2010	6:23:32 AM	BCl3 MFC set to  0.000000
3/12/2010	6:23:32 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:23:32 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:23:32 AM	Tube furnace set to 0
3/12/2010	6:24:55 AM	Helium valve closed
3/12/2010	6:24:55 AM	H2 valve closed
3/12/2010	6:24:55 AM	BCl3 valve closed
3/12/2010	6:24:55 AM	PH3 valve closed
3/12/2010	6:24:55 AM	SiCl4 pre valve closed
3/12/2010	6:24:55 AM	SiCl4 post valve closed
3/12/2010	6:24:55 AM	Main Vac valve closed
3/12/2010	6:24:55 AM	Bypass valve closed
3/12/2010	6:24:55 AM	Bubbler valve closed
3/12/2010	6:24:55 AM	Helium MFC set to  0.000000
3/12/2010	6:24:55 AM	H2 MFC set to  0.000000
3/12/2010	6:24:55 AM	BCl3 MFC set to  0.000000
3/12/2010	6:24:55 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:24:55 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:24:55 AM	Tube furnace set to 0
3/12/2010	6:25:10 AM	Helium valve closed
3/12/2010	6:25:10 AM	H2 valve closed
3/12/2010	6:25:10 AM	BCl3 valve closed
3/12/2010	6:25:10 AM	PH3 valve closed
3/12/2010	6:25:10 AM	SiCl4 pre valve closed
3/12/2010	6:25:10 AM	SiCl4 post valve closed
3/12/2010	6:25:10 AM	Main Vac valve closed
3/12/2010	6:25:10 AM	Bubbler valve closed
3/12/2010	6:25:10 AM	Bypass valve opened
3/12/2010	6:25:10 AM	Helium MFC set to  0.000000
3/12/2010	6:25:10 AM	H2 MFC set to  0.000000
3/12/2010	6:25:10 AM	BCl3 MFC set to  0.000000
3/12/2010	6:25:10 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:25:10 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:25:10 AM	Tube furnace set to 0
3/12/2010	6:25:33 AM	Helium valve closed
3/12/2010	6:25:33 AM	H2 valve closed
3/12/2010	6:25:33 AM	BCl3 valve closed
3/12/2010	6:25:33 AM	PH3 valve closed
3/12/2010	6:25:33 AM	SiCl4 pre valve closed
3/12/2010	6:25:33 AM	SiCl4 post valve closed
3/12/2010	6:25:33 AM	Bubbler valve closed
3/12/2010	6:25:33 AM	Main Vac valve opened
3/12/2010	6:25:33 AM	Bypass valve opened
3/12/2010	6:25:33 AM	Helium MFC set to  0.000000
3/12/2010	6:25:33 AM	H2 MFC set to  0.000000
3/12/2010	6:25:33 AM	BCl3 MFC set to  0.000000
3/12/2010	6:25:33 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:25:33 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:25:33 AM	Tube furnace set to 0
3/12/2010	6:26:13 AM	Helium valve closed
3/12/2010	6:26:13 AM	H2 valve closed
3/12/2010	6:26:13 AM	BCl3 valve closed
3/12/2010	6:26:13 AM	PH3 valve closed
3/12/2010	6:26:13 AM	SiCl4 pre valve closed
3/12/2010	6:26:13 AM	SiCl4 post valve closed
3/12/2010	6:26:13 AM	Bubbler valve closed
3/12/2010	6:26:13 AM	Main Vac valve opened
3/12/2010	6:26:13 AM	Bypass valve opened
3/12/2010	6:26:13 AM	Helium MFC set to  0.000000
3/12/2010	6:26:13 AM	H2 MFC set to  0.000000
3/12/2010	6:26:13 AM	BCl3 MFC set to  0.000000
3/12/2010	6:26:13 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:26:13 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:26:13 AM	Tube furnace set to 0
3/12/2010	6:26:14 AM	Run finished at 6:26 AM
3/12/2010	6:26:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	6:26:29 AM	Main Vac valve closed
3/12/2010	6:26:30 AM	Bypass valve closed
3/12/2010	6:26:43 AM	Main Vac valve opened
3/12/2010	6:26:43 AM	Bypass valve opened
3/12/2010	6:27:03 AM	Recipe started at 6:27 AM
3/12/2010	6:27:03 AM	Helium valve closed
3/12/2010	6:27:03 AM	BCl3 valve closed
3/12/2010	6:27:03 AM	PH3 valve closed
3/12/2010	6:27:03 AM	SiCl4 pre valve closed
3/12/2010	6:27:03 AM	SiCl4 post valve closed
3/12/2010	6:27:03 AM	Main Vac valve closed
3/12/2010	6:27:03 AM	Bypass valve closed
3/12/2010	6:27:03 AM	Bubbler valve closed
3/12/2010	6:27:03 AM	H2 valve opened
3/12/2010	6:27:03 AM	Helium MFC set to  0.000000
3/12/2010	6:27:03 AM	H2 MFC set to  500.000000
3/12/2010	6:27:03 AM	BCl3 MFC set to  0.000000
3/12/2010	6:27:03 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:27:03 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:27:03 AM	Tube furnace set to 0
3/12/2010	6:28:25 AM	Helium valve closed
3/12/2010	6:28:25 AM	BCl3 valve closed
3/12/2010	6:28:25 AM	PH3 valve closed
3/12/2010	6:28:25 AM	SiCl4 pre valve closed
3/12/2010	6:28:25 AM	SiCl4 post valve closed
3/12/2010	6:28:25 AM	Main Vac valve closed
3/12/2010	6:28:25 AM	Bypass valve closed
3/12/2010	6:28:25 AM	H2 valve opened
3/12/2010	6:28:25 AM	Bubbler valve opened
3/12/2010	6:28:25 AM	Helium MFC set to  0.000000
3/12/2010	6:28:25 AM	H2 MFC set to  500.000000
3/12/2010	6:28:25 AM	BCl3 MFC set to  0.000000
3/12/2010	6:28:25 AM	SiCl4 MFC set to  0.000000
3/12/2010	6:28:25 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:28:25 AM	Tube furnace set to 0
3/12/2010	6:48:25 AM	Helium valve closed
3/12/2010	6:48:25 AM	PH3 valve closed
3/12/2010	6:48:25 AM	Main Vac valve closed
3/12/2010	6:48:25 AM	Bypass valve closed
3/12/2010	6:48:25 AM	H2 valve opened
3/12/2010	6:48:25 AM	BCl3 valve opened
3/12/2010	6:48:25 AM	SiCl4 pre valve opened
3/12/2010	6:48:25 AM	SiCl4 post valve opened
3/12/2010	6:48:25 AM	Bubbler valve opened
3/12/2010	6:48:25 AM	Helium MFC set to  0.000000
3/12/2010	6:48:25 AM	H2 MFC set to  500.000000
3/12/2010	6:48:25 AM	BCl3 MFC set to  35.000000
3/12/2010	6:48:25 AM	SiCl4 MFC set to  325.000000
3/12/2010	6:48:25 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:48:25 AM	Tube furnace set to 0
3/12/2010	7:03:26 AM	Helium valve closed
3/12/2010	7:03:26 AM	BCl3 valve closed
3/12/2010	7:03:26 AM	PH3 valve closed
3/12/2010	7:03:26 AM	SiCl4 pre valve closed
3/12/2010	7:03:26 AM	SiCl4 post valve closed
3/12/2010	7:03:26 AM	Main Vac valve closed
3/12/2010	7:03:26 AM	Bypass valve closed
3/12/2010	7:03:26 AM	H2 valve opened
3/12/2010	7:03:26 AM	Bubbler valve opened
3/12/2010	7:03:26 AM	Helium MFC set to  0.000000
3/12/2010	7:03:26 AM	H2 MFC set to  500.000000
3/12/2010	7:03:26 AM	BCl3 MFC set to  0.000000
3/12/2010	7:03:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	7:03:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	7:03:26 AM	Tube furnace set to 0
3/12/2010	7:23:26 AM	H2 valve closed
3/12/2010	7:23:26 AM	BCl3 valve closed
3/12/2010	7:23:26 AM	PH3 valve closed
3/12/2010	7:23:26 AM	SiCl4 pre valve closed
3/12/2010	7:23:26 AM	SiCl4 post valve closed
3/12/2010	7:23:26 AM	Main Vac valve closed
3/12/2010	7:23:26 AM	Bypass valve closed
3/12/2010	7:23:26 AM	Helium valve opened
3/12/2010	7:23:26 AM	Bubbler valve opened
3/12/2010	7:23:26 AM	Helium MFC set to  500.000000
3/12/2010	7:23:26 AM	H2 MFC set to  0.000000
3/12/2010	7:23:26 AM	BCl3 MFC set to  0.000000
3/12/2010	7:23:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	7:23:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	7:23:26 AM	Tube furnace set to 0
3/12/2010	7:43:26 AM	Helium valve closed
3/12/2010	7:43:26 AM	H2 valve closed
3/12/2010	7:43:26 AM	BCl3 valve closed
3/12/2010	7:43:26 AM	PH3 valve closed
3/12/2010	7:43:26 AM	SiCl4 pre valve closed
3/12/2010	7:43:26 AM	SiCl4 post valve closed
3/12/2010	7:43:26 AM	Main Vac valve closed
3/12/2010	7:43:26 AM	Bypass valve closed
3/12/2010	7:43:26 AM	Bubbler valve closed
3/12/2010	7:43:26 AM	Helium MFC set to  0.000000
3/12/2010	7:43:26 AM	H2 MFC set to  0.000000
3/12/2010	7:43:26 AM	BCl3 MFC set to  0.000000
3/12/2010	7:43:26 AM	SiCl4 MFC set to  0.000000
3/12/2010	7:43:26 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	7:43:26 AM	Tube furnace set to 0
3/12/2010	7:43:26 AM	Run finished at 7:43 AM
3/12/2010	8:09:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	8:09:15 AM	Recipe started at 8:09 AM
3/12/2010	8:09:15 AM	Helium valve closed
3/12/2010	8:09:15 AM	H2 valve closed
3/12/2010	8:09:15 AM	BCl3 valve closed
3/12/2010	8:09:15 AM	PH3 valve closed
3/12/2010	8:09:15 AM	SiCl4 pre valve closed
3/12/2010	8:09:15 AM	SiCl4 post valve closed
3/12/2010	8:09:15 AM	Main Vac valve closed
3/12/2010	8:09:15 AM	Bubbler valve closed
3/12/2010	8:09:15 AM	Bypass valve opened
3/12/2010	8:09:15 AM	Helium MFC set to  0.000000
3/12/2010	8:09:15 AM	H2 MFC set to  0.000000
3/12/2010	8:09:16 AM	BCl3 MFC set to  0.000000
3/12/2010	8:09:16 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:09:16 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:09:16 AM	Tube furnace set to 0
3/12/2010	8:09:47 AM	Helium valve closed
3/12/2010	8:09:47 AM	H2 valve closed
3/12/2010	8:09:47 AM	BCl3 valve closed
3/12/2010	8:09:47 AM	PH3 valve closed
3/12/2010	8:09:47 AM	SiCl4 pre valve closed
3/12/2010	8:09:47 AM	SiCl4 post valve closed
3/12/2010	8:09:47 AM	Bubbler valve closed
3/12/2010	8:09:47 AM	Main Vac valve opened
3/12/2010	8:09:47 AM	Bypass valve opened
3/12/2010	8:09:47 AM	Helium MFC set to  0.000000
3/12/2010	8:09:47 AM	H2 MFC set to  0.000000
3/12/2010	8:09:47 AM	BCl3 MFC set to  0.000000
3/12/2010	8:09:47 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:09:47 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:09:47 AM	Tube furnace set to 0
3/12/2010	8:09:47 AM	Run finished at 8:09 AM
3/12/2010	8:09:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	8:14:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	8:14:46 AM	Recipe started at 8:14 AM
3/12/2010	8:14:46 AM	H2 valve closed
3/12/2010	8:14:46 AM	BCl3 valve closed
3/12/2010	8:14:46 AM	PH3 valve closed
3/12/2010	8:14:46 AM	SiCl4 pre valve closed
3/12/2010	8:14:46 AM	SiCl4 post valve closed
3/12/2010	8:14:46 AM	Main Vac valve closed
3/12/2010	8:14:46 AM	Bypass valve closed
3/12/2010	8:14:46 AM	Bubbler valve closed
3/12/2010	8:14:46 AM	Helium valve opened
3/12/2010	8:14:46 AM	Helium MFC set to  500.000000
3/12/2010	8:14:46 AM	H2 MFC set to  0.000000
3/12/2010	8:14:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:14:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:14:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:14:46 AM	Tube furnace set to 0
3/12/2010	8:16:08 AM	Helium valve closed
3/12/2010	8:16:08 AM	H2 valve closed
3/12/2010	8:16:08 AM	BCl3 valve closed
3/12/2010	8:16:08 AM	PH3 valve closed
3/12/2010	8:16:08 AM	SiCl4 pre valve closed
3/12/2010	8:16:08 AM	SiCl4 post valve closed
3/12/2010	8:16:08 AM	Main Vac valve closed
3/12/2010	8:16:08 AM	Bypass valve closed
3/12/2010	8:16:08 AM	Bubbler valve closed
3/12/2010	8:16:08 AM	Helium MFC set to  0.000000
3/12/2010	8:16:08 AM	H2 MFC set to  0.000000
3/12/2010	8:16:08 AM	BCl3 MFC set to  0.000000
3/12/2010	8:16:08 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:16:08 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:16:08 AM	Tube furnace set to 0
3/12/2010	8:16:23 AM	Helium valve closed
3/12/2010	8:16:23 AM	H2 valve closed
3/12/2010	8:16:23 AM	BCl3 valve closed
3/12/2010	8:16:23 AM	PH3 valve closed
3/12/2010	8:16:23 AM	SiCl4 pre valve closed
3/12/2010	8:16:23 AM	SiCl4 post valve closed
3/12/2010	8:16:23 AM	Main Vac valve closed
3/12/2010	8:16:23 AM	Bubbler valve closed
3/12/2010	8:16:23 AM	Bypass valve opened
3/12/2010	8:16:23 AM	Helium MFC set to  0.000000
3/12/2010	8:16:23 AM	H2 MFC set to  0.000000
3/12/2010	8:16:23 AM	BCl3 MFC set to  0.000000
3/12/2010	8:16:23 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:16:23 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:16:23 AM	Tube furnace set to 0
3/12/2010	8:16:46 AM	Helium valve closed
3/12/2010	8:16:46 AM	H2 valve closed
3/12/2010	8:16:46 AM	BCl3 valve closed
3/12/2010	8:16:46 AM	PH3 valve closed
3/12/2010	8:16:46 AM	SiCl4 pre valve closed
3/12/2010	8:16:46 AM	SiCl4 post valve closed
3/12/2010	8:16:46 AM	Bubbler valve closed
3/12/2010	8:16:46 AM	Main Vac valve opened
3/12/2010	8:16:46 AM	Bypass valve opened
3/12/2010	8:16:46 AM	Helium MFC set to  0.000000
3/12/2010	8:16:46 AM	H2 MFC set to  0.000000
3/12/2010	8:16:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:16:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:16:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:16:46 AM	Tube furnace set to 0
3/12/2010	8:21:46 AM	H2 valve closed
3/12/2010	8:21:46 AM	BCl3 valve closed
3/12/2010	8:21:46 AM	PH3 valve closed
3/12/2010	8:21:46 AM	SiCl4 pre valve closed
3/12/2010	8:21:46 AM	SiCl4 post valve closed
3/12/2010	8:21:46 AM	Main Vac valve closed
3/12/2010	8:21:46 AM	Bypass valve closed
3/12/2010	8:21:46 AM	Bubbler valve closed
3/12/2010	8:21:46 AM	Helium valve opened
3/12/2010	8:21:46 AM	Helium MFC set to  500.000000
3/12/2010	8:21:46 AM	H2 MFC set to  0.000000
3/12/2010	8:21:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:21:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:21:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:21:46 AM	Tube furnace set to 0
3/12/2010	8:23:08 AM	Helium valve closed
3/12/2010	8:23:08 AM	H2 valve closed
3/12/2010	8:23:08 AM	BCl3 valve closed
3/12/2010	8:23:08 AM	PH3 valve closed
3/12/2010	8:23:08 AM	SiCl4 pre valve closed
3/12/2010	8:23:08 AM	SiCl4 post valve closed
3/12/2010	8:23:08 AM	Main Vac valve closed
3/12/2010	8:23:08 AM	Bypass valve closed
3/12/2010	8:23:08 AM	Bubbler valve closed
3/12/2010	8:23:08 AM	Helium MFC set to  0.000000
3/12/2010	8:23:08 AM	H2 MFC set to  0.000000
3/12/2010	8:23:08 AM	BCl3 MFC set to  0.000000
3/12/2010	8:23:08 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:23:08 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:23:08 AM	Tube furnace set to 0
3/12/2010	8:23:24 AM	Helium valve closed
3/12/2010	8:23:24 AM	H2 valve closed
3/12/2010	8:23:24 AM	BCl3 valve closed
3/12/2010	8:23:24 AM	PH3 valve closed
3/12/2010	8:23:24 AM	SiCl4 pre valve closed
3/12/2010	8:23:24 AM	SiCl4 post valve closed
3/12/2010	8:23:24 AM	Main Vac valve closed
3/12/2010	8:23:24 AM	Bubbler valve closed
3/12/2010	8:23:24 AM	Bypass valve opened
3/12/2010	8:23:24 AM	Helium MFC set to  0.000000
3/12/2010	8:23:24 AM	H2 MFC set to  0.000000
3/12/2010	8:23:24 AM	BCl3 MFC set to  0.000000
3/12/2010	8:23:24 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:23:24 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:23:24 AM	Tube furnace set to 0
3/12/2010	8:23:46 AM	Helium valve closed
3/12/2010	8:23:46 AM	H2 valve closed
3/12/2010	8:23:46 AM	BCl3 valve closed
3/12/2010	8:23:46 AM	PH3 valve closed
3/12/2010	8:23:46 AM	SiCl4 pre valve closed
3/12/2010	8:23:46 AM	SiCl4 post valve closed
3/12/2010	8:23:46 AM	Bubbler valve closed
3/12/2010	8:23:46 AM	Main Vac valve opened
3/12/2010	8:23:46 AM	Bypass valve opened
3/12/2010	8:23:46 AM	Helium MFC set to  0.000000
3/12/2010	8:23:46 AM	H2 MFC set to  0.000000
3/12/2010	8:23:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:23:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:23:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:23:46 AM	Tube furnace set to 0
3/12/2010	8:28:46 AM	H2 valve closed
3/12/2010	8:28:46 AM	BCl3 valve closed
3/12/2010	8:28:46 AM	PH3 valve closed
3/12/2010	8:28:46 AM	SiCl4 pre valve closed
3/12/2010	8:28:46 AM	SiCl4 post valve closed
3/12/2010	8:28:46 AM	Main Vac valve closed
3/12/2010	8:28:46 AM	Bypass valve closed
3/12/2010	8:28:46 AM	Bubbler valve closed
3/12/2010	8:28:46 AM	Helium valve opened
3/12/2010	8:28:46 AM	Helium MFC set to  500.000000
3/12/2010	8:28:46 AM	H2 MFC set to  0.000000
3/12/2010	8:28:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:28:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:28:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:28:46 AM	Tube furnace set to 0
3/12/2010	8:30:09 AM	Helium valve closed
3/12/2010	8:30:09 AM	H2 valve closed
3/12/2010	8:30:09 AM	BCl3 valve closed
3/12/2010	8:30:09 AM	PH3 valve closed
3/12/2010	8:30:09 AM	SiCl4 pre valve closed
3/12/2010	8:30:09 AM	SiCl4 post valve closed
3/12/2010	8:30:09 AM	Main Vac valve closed
3/12/2010	8:30:09 AM	Bypass valve closed
3/12/2010	8:30:09 AM	Bubbler valve closed
3/12/2010	8:30:09 AM	Helium MFC set to  0.000000
3/12/2010	8:30:09 AM	H2 MFC set to  0.000000
3/12/2010	8:30:09 AM	BCl3 MFC set to  0.000000
3/12/2010	8:30:09 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:30:09 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:30:09 AM	Tube furnace set to 0
3/12/2010	8:30:24 AM	Helium valve closed
3/12/2010	8:30:24 AM	H2 valve closed
3/12/2010	8:30:24 AM	BCl3 valve closed
3/12/2010	8:30:24 AM	PH3 valve closed
3/12/2010	8:30:24 AM	SiCl4 pre valve closed
3/12/2010	8:30:24 AM	SiCl4 post valve closed
3/12/2010	8:30:24 AM	Main Vac valve closed
3/12/2010	8:30:24 AM	Bubbler valve closed
3/12/2010	8:30:24 AM	Bypass valve opened
3/12/2010	8:30:24 AM	Helium MFC set to  0.000000
3/12/2010	8:30:24 AM	H2 MFC set to  0.000000
3/12/2010	8:30:24 AM	BCl3 MFC set to  0.000000
3/12/2010	8:30:24 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:30:24 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:30:24 AM	Tube furnace set to 0
3/12/2010	8:30:46 AM	Helium valve closed
3/12/2010	8:30:46 AM	H2 valve closed
3/12/2010	8:30:46 AM	BCl3 valve closed
3/12/2010	8:30:46 AM	PH3 valve closed
3/12/2010	8:30:46 AM	SiCl4 pre valve closed
3/12/2010	8:30:46 AM	SiCl4 post valve closed
3/12/2010	8:30:46 AM	Bubbler valve closed
3/12/2010	8:30:46 AM	Main Vac valve opened
3/12/2010	8:30:46 AM	Bypass valve opened
3/12/2010	8:30:46 AM	Helium MFC set to  0.000000
3/12/2010	8:30:46 AM	H2 MFC set to  0.000000
3/12/2010	8:30:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:30:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:30:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:30:46 AM	Tube furnace set to 0
3/12/2010	8:35:46 AM	Helium valve closed
3/12/2010	8:35:46 AM	H2 valve closed
3/12/2010	8:35:46 AM	BCl3 valve closed
3/12/2010	8:35:46 AM	PH3 valve closed
3/12/2010	8:35:46 AM	SiCl4 pre valve closed
3/12/2010	8:35:46 AM	SiCl4 post valve closed
3/12/2010	8:35:46 AM	Bubbler valve closed
3/12/2010	8:35:46 AM	Main Vac valve opened
3/12/2010	8:35:46 AM	Bypass valve opened
3/12/2010	8:35:46 AM	Helium MFC set to  0.000000
3/12/2010	8:35:46 AM	H2 MFC set to  0.000000
3/12/2010	8:35:46 AM	BCl3 MFC set to  0.000000
3/12/2010	8:35:46 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:35:46 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:35:46 AM	Tube furnace set to 0
3/12/2010	8:35:48 AM	Run finished at 8:35 AM
3/12/2010	8:35:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	8:42:51 AM	Bypass valve closed
3/12/2010	8:42:51 AM	Main Vac valve closed
3/12/2010	8:43:27 AM	Bypass valve opened
3/12/2010	8:43:27 AM	Main Vac valve opened
3/12/2010	8:44:01 AM	Bypass valve closed
3/12/2010	8:44:02 AM	Main Vac valve closed
3/12/2010	8:44:14 AM	Bypass valve opened
3/12/2010	8:44:14 AM	Main Vac valve opened
3/12/2010	8:44:39 AM	Recipe started at 8:44 AM
3/12/2010	8:44:39 AM	Helium valve closed
3/12/2010	8:44:39 AM	BCl3 valve closed
3/12/2010	8:44:39 AM	PH3 valve closed
3/12/2010	8:44:39 AM	SiCl4 pre valve closed
3/12/2010	8:44:39 AM	SiCl4 post valve closed
3/12/2010	8:44:39 AM	Main Vac valve closed
3/12/2010	8:44:39 AM	Bypass valve closed
3/12/2010	8:44:39 AM	Bubbler valve closed
3/12/2010	8:44:39 AM	H2 valve opened
3/12/2010	8:44:39 AM	Helium MFC set to  0.000000
3/12/2010	8:44:39 AM	H2 MFC set to  500.000000
3/12/2010	8:44:39 AM	BCl3 MFC set to  0.000000
3/12/2010	8:44:39 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:44:39 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:44:39 AM	Tube furnace set to 0
3/12/2010	8:46:02 AM	Helium valve closed
3/12/2010	8:46:02 AM	BCl3 valve closed
3/12/2010	8:46:02 AM	PH3 valve closed
3/12/2010	8:46:02 AM	SiCl4 pre valve closed
3/12/2010	8:46:02 AM	SiCl4 post valve closed
3/12/2010	8:46:02 AM	Main Vac valve closed
3/12/2010	8:46:02 AM	Bypass valve closed
3/12/2010	8:46:02 AM	H2 valve opened
3/12/2010	8:46:02 AM	Bubbler valve opened
3/12/2010	8:46:02 AM	Helium MFC set to  0.000000
3/12/2010	8:46:02 AM	H2 MFC set to  500.000000
3/12/2010	8:46:02 AM	BCl3 MFC set to  0.000000
3/12/2010	8:46:02 AM	SiCl4 MFC set to  0.000000
3/12/2010	8:46:02 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	8:46:02 AM	Tube furnace set to 0
3/12/2010	9:06:02 AM	Helium valve closed
3/12/2010	9:06:02 AM	PH3 valve closed
3/12/2010	9:06:02 AM	Main Vac valve closed
3/12/2010	9:06:02 AM	Bypass valve closed
3/12/2010	9:06:02 AM	H2 valve opened
3/12/2010	9:06:02 AM	BCl3 valve opened
3/12/2010	9:06:02 AM	SiCl4 pre valve opened
3/12/2010	9:06:02 AM	SiCl4 post valve opened
3/12/2010	9:06:02 AM	Bubbler valve opened
3/12/2010	9:06:02 AM	Helium MFC set to  0.000000
3/12/2010	9:06:02 AM	H2 MFC set to  500.000000
3/12/2010	9:06:02 AM	BCl3 MFC set to  35.000000
3/12/2010	9:06:02 AM	SiCl4 MFC set to  325.000000
3/12/2010	9:06:02 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	9:06:02 AM	Tube furnace set to 0
3/12/2010	9:21:02 AM	Helium valve closed
3/12/2010	9:21:02 AM	BCl3 valve closed
3/12/2010	9:21:02 AM	PH3 valve closed
3/12/2010	9:21:02 AM	SiCl4 pre valve closed
3/12/2010	9:21:02 AM	SiCl4 post valve closed
3/12/2010	9:21:02 AM	Main Vac valve closed
3/12/2010	9:21:02 AM	Bypass valve closed
3/12/2010	9:21:02 AM	H2 valve opened
3/12/2010	9:21:02 AM	Bubbler valve opened
3/12/2010	9:21:02 AM	Helium MFC set to  0.000000
3/12/2010	9:21:02 AM	H2 MFC set to  500.000000
3/12/2010	9:21:02 AM	BCl3 MFC set to  0.000000
3/12/2010	9:21:02 AM	SiCl4 MFC set to  0.000000
3/12/2010	9:21:02 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	9:21:02 AM	Tube furnace set to 0
3/12/2010	9:41:02 AM	H2 valve closed
3/12/2010	9:41:02 AM	BCl3 valve closed
3/12/2010	9:41:02 AM	PH3 valve closed
3/12/2010	9:41:02 AM	SiCl4 pre valve closed
3/12/2010	9:41:02 AM	SiCl4 post valve closed
3/12/2010	9:41:02 AM	Main Vac valve closed
3/12/2010	9:41:02 AM	Bypass valve closed
3/12/2010	9:41:02 AM	Helium valve opened
3/12/2010	9:41:02 AM	Bubbler valve opened
3/12/2010	9:41:02 AM	Helium MFC set to  500.000000
3/12/2010	9:41:02 AM	H2 MFC set to  0.000000
3/12/2010	9:41:02 AM	BCl3 MFC set to  0.000000
3/12/2010	9:41:02 AM	SiCl4 MFC set to  0.000000
3/12/2010	9:41:02 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	9:41:02 AM	Tube furnace set to 0
3/12/2010	9:56:27 AM	Helium valve closed
3/12/2010	9:56:27 AM	H2 valve closed
3/12/2010	9:56:27 AM	BCl3 valve closed
3/12/2010	9:56:27 AM	PH3 valve closed
3/12/2010	9:56:27 AM	SiCl4 pre valve closed
3/12/2010	9:56:27 AM	SiCl4 post valve closed
3/12/2010	9:56:27 AM	Main Vac valve closed
3/12/2010	9:56:27 AM	Bypass valve closed
3/12/2010	9:56:27 AM	Bubbler valve closed
3/12/2010	9:56:27 AM	Helium MFC set to  0.000000
3/12/2010	9:56:27 AM	H2 MFC set to  0.000000
3/12/2010	9:56:27 AM	BCl3 MFC set to  0.000000
3/12/2010	9:56:27 AM	SiCl4 MFC set to  0.000000
3/12/2010	9:56:27 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	9:56:27 AM	Tube furnace set to 0
3/12/2010	9:56:27 AM	Run finished at 9:56 AM
3/12/2010	9:59:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	9:59:58 AM	Recipe started at 9:59 AM
3/12/2010	9:59:58 AM	Helium valve closed
3/12/2010	9:59:58 AM	H2 valve closed
3/12/2010	9:59:58 AM	BCl3 valve closed
3/12/2010	9:59:58 AM	PH3 valve closed
3/12/2010	9:59:58 AM	SiCl4 pre valve closed
3/12/2010	9:59:58 AM	SiCl4 post valve closed
3/12/2010	9:59:58 AM	Main Vac valve closed
3/12/2010	9:59:58 AM	Bubbler valve closed
3/12/2010	9:59:58 AM	Bypass valve opened
3/12/2010	9:59:58 AM	Helium MFC set to  0.000000
3/12/2010	9:59:58 AM	H2 MFC set to  0.000000
3/12/2010	9:59:58 AM	BCl3 MFC set to  0.000000
3/12/2010	9:59:58 AM	SiCl4 MFC set to  0.000000
3/12/2010	9:59:58 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	9:59:58 AM	Tube furnace set to 0
3/12/2010	10:00:28 AM	Helium valve closed
3/12/2010	10:00:28 AM	H2 valve closed
3/12/2010	10:00:28 AM	BCl3 valve closed
3/12/2010	10:00:28 AM	PH3 valve closed
3/12/2010	10:00:28 AM	SiCl4 pre valve closed
3/12/2010	10:00:28 AM	SiCl4 post valve closed
3/12/2010	10:00:28 AM	Bubbler valve closed
3/12/2010	10:00:28 AM	Main Vac valve opened
3/12/2010	10:00:28 AM	Bypass valve opened
3/12/2010	10:00:28 AM	Helium MFC set to  0.000000
3/12/2010	10:00:28 AM	H2 MFC set to  0.000000
3/12/2010	10:00:28 AM	BCl3 MFC set to  0.000000
3/12/2010	10:00:28 AM	SiCl4 MFC set to  0.000000
3/12/2010	10:00:28 AM	Bypass solenoid MFC set to  0.000000
3/12/2010	10:00:28 AM	Tube furnace set to 0
3/12/2010	10:00:28 AM	Run finished at 10:00 AM
3/12/2010	10:00:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:04:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	12:04:19 PM	Recipe started at 12:04 PM
3/12/2010	12:04:20 PM	H2 valve closed
3/12/2010	12:04:20 PM	BCl3 valve closed
3/12/2010	12:04:20 PM	PH3 valve closed
3/12/2010	12:04:20 PM	SiCl4 pre valve closed
3/12/2010	12:04:20 PM	SiCl4 post valve closed
3/12/2010	12:04:20 PM	Main Vac valve closed
3/12/2010	12:04:20 PM	Bypass valve closed
3/12/2010	12:04:20 PM	Bubbler valve closed
3/12/2010	12:04:20 PM	Helium valve opened
3/12/2010	12:04:20 PM	Helium MFC set to  500.000000
3/12/2010	12:04:20 PM	H2 MFC set to  0.000000
3/12/2010	12:04:20 PM	BCl3 MFC set to  0.000000
3/12/2010	12:04:20 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:04:20 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:04:20 PM	Tube furnace set to 0
3/12/2010	12:05:41 PM	Helium valve closed
3/12/2010	12:05:41 PM	H2 valve closed
3/12/2010	12:05:41 PM	BCl3 valve closed
3/12/2010	12:05:41 PM	PH3 valve closed
3/12/2010	12:05:41 PM	SiCl4 pre valve closed
3/12/2010	12:05:41 PM	SiCl4 post valve closed
3/12/2010	12:05:41 PM	Main Vac valve closed
3/12/2010	12:05:41 PM	Bypass valve closed
3/12/2010	12:05:41 PM	Bubbler valve closed
3/12/2010	12:05:41 PM	Helium MFC set to  0.000000
3/12/2010	12:05:41 PM	H2 MFC set to  0.000000
3/12/2010	12:05:41 PM	BCl3 MFC set to  0.000000
3/12/2010	12:05:41 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:05:41 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:05:41 PM	Tube furnace set to 0
3/12/2010	12:05:41 PM	Run finished at 12:05 PM
3/12/2010	12:05:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	12:11:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:11:20 PM	Recipe started at 12:11 PM
3/12/2010	12:11:20 PM	Helium valve closed
3/12/2010	12:11:20 PM	H2 valve closed
3/12/2010	12:11:20 PM	BCl3 valve closed
3/12/2010	12:11:20 PM	PH3 valve closed
3/12/2010	12:11:20 PM	SiCl4 pre valve closed
3/12/2010	12:11:20 PM	SiCl4 post valve closed
3/12/2010	12:11:20 PM	Main Vac valve closed
3/12/2010	12:11:20 PM	Bubbler valve closed
3/12/2010	12:11:20 PM	Bypass valve opened
3/12/2010	12:11:20 PM	Helium MFC set to  0.000000
3/12/2010	12:11:20 PM	H2 MFC set to  0.000000
3/12/2010	12:11:20 PM	BCl3 MFC set to  0.000000
3/12/2010	12:11:20 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:11:20 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:11:20 PM	Tube furnace set to 0
3/12/2010	12:11:51 PM	Helium valve closed
3/12/2010	12:11:51 PM	H2 valve closed
3/12/2010	12:11:51 PM	BCl3 valve closed
3/12/2010	12:11:51 PM	PH3 valve closed
3/12/2010	12:11:51 PM	SiCl4 pre valve closed
3/12/2010	12:11:51 PM	SiCl4 post valve closed
3/12/2010	12:11:51 PM	Bubbler valve closed
3/12/2010	12:11:51 PM	Main Vac valve opened
3/12/2010	12:11:51 PM	Bypass valve opened
3/12/2010	12:11:51 PM	Helium MFC set to  0.000000
3/12/2010	12:11:51 PM	H2 MFC set to  0.000000
3/12/2010	12:11:51 PM	BCl3 MFC set to  0.000000
3/12/2010	12:11:51 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:11:51 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:11:51 PM	Tube furnace set to 0
3/12/2010	12:11:51 PM	Run finished at 12:11 PM
3/12/2010	12:11:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	12:12:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	12:12:20 PM	Recipe started at 12:12 PM
3/12/2010	12:12:20 PM	H2 valve closed
3/12/2010	12:12:20 PM	BCl3 valve closed
3/12/2010	12:12:20 PM	PH3 valve closed
3/12/2010	12:12:20 PM	SiCl4 pre valve closed
3/12/2010	12:12:20 PM	SiCl4 post valve closed
3/12/2010	12:12:20 PM	Main Vac valve closed
3/12/2010	12:12:20 PM	Bypass valve closed
3/12/2010	12:12:20 PM	Bubbler valve closed
3/12/2010	12:12:20 PM	Helium valve opened
3/12/2010	12:12:20 PM	Helium MFC set to  500.000000
3/12/2010	12:12:20 PM	H2 MFC set to  0.000000
3/12/2010	12:12:20 PM	BCl3 MFC set to  0.000000
3/12/2010	12:12:20 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:12:20 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:12:20 PM	Tube furnace set to 0
3/12/2010	12:13:43 PM	Helium valve closed
3/12/2010	12:13:43 PM	H2 valve closed
3/12/2010	12:13:43 PM	BCl3 valve closed
3/12/2010	12:13:43 PM	PH3 valve closed
3/12/2010	12:13:43 PM	SiCl4 pre valve closed
3/12/2010	12:13:43 PM	SiCl4 post valve closed
3/12/2010	12:13:43 PM	Main Vac valve closed
3/12/2010	12:13:43 PM	Bypass valve closed
3/12/2010	12:13:43 PM	Bubbler valve closed
3/12/2010	12:13:43 PM	Helium MFC set to  0.000000
3/12/2010	12:13:43 PM	H2 MFC set to  0.000000
3/12/2010	12:13:43 PM	BCl3 MFC set to  0.000000
3/12/2010	12:13:43 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:13:43 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:13:43 PM	Tube furnace set to 0
3/12/2010	12:13:58 PM	Helium valve closed
3/12/2010	12:13:58 PM	H2 valve closed
3/12/2010	12:13:58 PM	BCl3 valve closed
3/12/2010	12:13:58 PM	PH3 valve closed
3/12/2010	12:13:58 PM	SiCl4 pre valve closed
3/12/2010	12:13:58 PM	SiCl4 post valve closed
3/12/2010	12:13:58 PM	Main Vac valve closed
3/12/2010	12:13:58 PM	Bubbler valve closed
3/12/2010	12:13:58 PM	Bypass valve opened
3/12/2010	12:13:58 PM	Helium MFC set to  0.000000
3/12/2010	12:13:58 PM	H2 MFC set to  0.000000
3/12/2010	12:13:58 PM	BCl3 MFC set to  0.000000
3/12/2010	12:13:58 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:13:58 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:13:58 PM	Tube furnace set to 0
3/12/2010	12:14:20 PM	Helium valve closed
3/12/2010	12:14:20 PM	H2 valve closed
3/12/2010	12:14:21 PM	BCl3 valve closed
3/12/2010	12:14:21 PM	PH3 valve closed
3/12/2010	12:14:21 PM	SiCl4 pre valve closed
3/12/2010	12:14:21 PM	SiCl4 post valve closed
3/12/2010	12:14:21 PM	Bubbler valve closed
3/12/2010	12:14:21 PM	Main Vac valve opened
3/12/2010	12:14:21 PM	Bypass valve opened
3/12/2010	12:14:21 PM	Helium MFC set to  0.000000
3/12/2010	12:14:21 PM	H2 MFC set to  0.000000
3/12/2010	12:14:21 PM	BCl3 MFC set to  0.000000
3/12/2010	12:14:21 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:14:21 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:14:21 PM	Tube furnace set to 0
3/12/2010	12:19:21 PM	H2 valve closed
3/12/2010	12:19:21 PM	BCl3 valve closed
3/12/2010	12:19:21 PM	PH3 valve closed
3/12/2010	12:19:21 PM	SiCl4 pre valve closed
3/12/2010	12:19:21 PM	SiCl4 post valve closed
3/12/2010	12:19:21 PM	Main Vac valve closed
3/12/2010	12:19:21 PM	Bypass valve closed
3/12/2010	12:19:21 PM	Bubbler valve closed
3/12/2010	12:19:21 PM	Helium valve opened
3/12/2010	12:19:21 PM	Helium MFC set to  500.000000
3/12/2010	12:19:21 PM	H2 MFC set to  0.000000
3/12/2010	12:19:21 PM	BCl3 MFC set to  0.000000
3/12/2010	12:19:21 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:19:21 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:19:21 PM	Tube furnace set to 0
3/12/2010	12:20:44 PM	Helium valve closed
3/12/2010	12:20:44 PM	H2 valve closed
3/12/2010	12:20:44 PM	BCl3 valve closed
3/12/2010	12:20:44 PM	PH3 valve closed
3/12/2010	12:20:44 PM	SiCl4 pre valve closed
3/12/2010	12:20:44 PM	SiCl4 post valve closed
3/12/2010	12:20:44 PM	Main Vac valve closed
3/12/2010	12:20:44 PM	Bypass valve closed
3/12/2010	12:20:44 PM	Bubbler valve closed
3/12/2010	12:20:44 PM	Helium MFC set to  0.000000
3/12/2010	12:20:44 PM	H2 MFC set to  0.000000
3/12/2010	12:20:44 PM	BCl3 MFC set to  0.000000
3/12/2010	12:20:44 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:20:44 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:20:44 PM	Tube furnace set to 0
3/12/2010	12:20:59 PM	Helium valve closed
3/12/2010	12:20:59 PM	H2 valve closed
3/12/2010	12:20:59 PM	BCl3 valve closed
3/12/2010	12:20:59 PM	PH3 valve closed
3/12/2010	12:20:59 PM	SiCl4 pre valve closed
3/12/2010	12:20:59 PM	SiCl4 post valve closed
3/12/2010	12:20:59 PM	Main Vac valve closed
3/12/2010	12:20:59 PM	Bubbler valve closed
3/12/2010	12:20:59 PM	Bypass valve opened
3/12/2010	12:20:59 PM	Helium MFC set to  0.000000
3/12/2010	12:20:59 PM	H2 MFC set to  0.000000
3/12/2010	12:20:59 PM	BCl3 MFC set to  0.000000
3/12/2010	12:20:59 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:20:59 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:20:59 PM	Tube furnace set to 0
3/12/2010	12:21:21 PM	Helium valve closed
3/12/2010	12:21:21 PM	H2 valve closed
3/12/2010	12:21:21 PM	BCl3 valve closed
3/12/2010	12:21:21 PM	PH3 valve closed
3/12/2010	12:21:21 PM	SiCl4 pre valve closed
3/12/2010	12:21:21 PM	SiCl4 post valve closed
3/12/2010	12:21:21 PM	Bubbler valve closed
3/12/2010	12:21:21 PM	Main Vac valve opened
3/12/2010	12:21:21 PM	Bypass valve opened
3/12/2010	12:21:21 PM	Helium MFC set to  0.000000
3/12/2010	12:21:21 PM	H2 MFC set to  0.000000
3/12/2010	12:21:21 PM	BCl3 MFC set to  0.000000
3/12/2010	12:21:21 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:21:21 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:21:21 PM	Tube furnace set to 0
3/12/2010	12:26:22 PM	H2 valve closed
3/12/2010	12:26:22 PM	BCl3 valve closed
3/12/2010	12:26:22 PM	PH3 valve closed
3/12/2010	12:26:22 PM	SiCl4 pre valve closed
3/12/2010	12:26:22 PM	SiCl4 post valve closed
3/12/2010	12:26:22 PM	Main Vac valve closed
3/12/2010	12:26:22 PM	Bypass valve closed
3/12/2010	12:26:22 PM	Bubbler valve closed
3/12/2010	12:26:22 PM	Helium valve opened
3/12/2010	12:26:22 PM	Helium MFC set to  500.000000
3/12/2010	12:26:22 PM	H2 MFC set to  0.000000
3/12/2010	12:26:22 PM	BCl3 MFC set to  0.000000
3/12/2010	12:26:22 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:26:22 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:26:22 PM	Tube furnace set to 0
3/12/2010	12:27:45 PM	Helium valve closed
3/12/2010	12:27:45 PM	H2 valve closed
3/12/2010	12:27:45 PM	BCl3 valve closed
3/12/2010	12:27:45 PM	PH3 valve closed
3/12/2010	12:27:45 PM	SiCl4 pre valve closed
3/12/2010	12:27:45 PM	SiCl4 post valve closed
3/12/2010	12:27:45 PM	Main Vac valve closed
3/12/2010	12:27:45 PM	Bypass valve closed
3/12/2010	12:27:45 PM	Bubbler valve closed
3/12/2010	12:27:45 PM	Helium MFC set to  0.000000
3/12/2010	12:27:45 PM	H2 MFC set to  0.000000
3/12/2010	12:27:45 PM	BCl3 MFC set to  0.000000
3/12/2010	12:27:45 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:27:45 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:27:45 PM	Tube furnace set to 0
3/12/2010	12:28:00 PM	Helium valve closed
3/12/2010	12:28:00 PM	H2 valve closed
3/12/2010	12:28:00 PM	BCl3 valve closed
3/12/2010	12:28:00 PM	PH3 valve closed
3/12/2010	12:28:00 PM	SiCl4 pre valve closed
3/12/2010	12:28:00 PM	SiCl4 post valve closed
3/12/2010	12:28:00 PM	Main Vac valve closed
3/12/2010	12:28:00 PM	Bubbler valve closed
3/12/2010	12:28:00 PM	Bypass valve opened
3/12/2010	12:28:00 PM	Helium MFC set to  0.000000
3/12/2010	12:28:00 PM	H2 MFC set to  0.000000
3/12/2010	12:28:00 PM	BCl3 MFC set to  0.000000
3/12/2010	12:28:00 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:28:00 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:28:00 PM	Tube furnace set to 0
3/12/2010	12:28:23 PM	Helium valve closed
3/12/2010	12:28:23 PM	H2 valve closed
3/12/2010	12:28:23 PM	BCl3 valve closed
3/12/2010	12:28:23 PM	PH3 valve closed
3/12/2010	12:28:23 PM	SiCl4 pre valve closed
3/12/2010	12:28:23 PM	SiCl4 post valve closed
3/12/2010	12:28:23 PM	Bubbler valve closed
3/12/2010	12:28:23 PM	Main Vac valve opened
3/12/2010	12:28:23 PM	Bypass valve opened
3/12/2010	12:28:23 PM	Helium MFC set to  0.000000
3/12/2010	12:28:23 PM	H2 MFC set to  0.000000
3/12/2010	12:28:23 PM	BCl3 MFC set to  0.000000
3/12/2010	12:28:23 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:28:23 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:28:23 PM	Tube furnace set to 0
3/12/2010	12:33:23 PM	Helium valve closed
3/12/2010	12:33:23 PM	H2 valve closed
3/12/2010	12:33:23 PM	BCl3 valve closed
3/12/2010	12:33:23 PM	PH3 valve closed
3/12/2010	12:33:23 PM	SiCl4 pre valve closed
3/12/2010	12:33:23 PM	SiCl4 post valve closed
3/12/2010	12:33:23 PM	Bubbler valve closed
3/12/2010	12:33:23 PM	Main Vac valve opened
3/12/2010	12:33:23 PM	Bypass valve opened
3/12/2010	12:33:23 PM	Helium MFC set to  0.000000
3/12/2010	12:33:23 PM	H2 MFC set to  0.000000
3/12/2010	12:33:23 PM	BCl3 MFC set to  0.000000
3/12/2010	12:33:23 PM	SiCl4 MFC set to  0.000000
3/12/2010	12:33:23 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	12:33:23 PM	Tube furnace set to 0
3/12/2010	12:33:24 PM	Run finished at 12:33 PM
3/12/2010	12:33:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	1:21:00 PM	Bypass valve closed
3/12/2010	1:21:00 PM	Main Vac valve closed
3/12/2010	1:21:15 PM	Bypass valve opened
3/12/2010	1:21:16 PM	Main Vac valve opened
3/12/2010	1:24:09 PM	Recipe started at 1:24 PM
3/12/2010	1:24:09 PM	Helium valve closed
3/12/2010	1:24:09 PM	BCl3 valve closed
3/12/2010	1:24:09 PM	PH3 valve closed
3/12/2010	1:24:09 PM	SiCl4 pre valve closed
3/12/2010	1:24:09 PM	SiCl4 post valve closed
3/12/2010	1:24:09 PM	Main Vac valve closed
3/12/2010	1:24:09 PM	Bypass valve closed
3/12/2010	1:24:09 PM	Bubbler valve closed
3/12/2010	1:24:09 PM	H2 valve opened
3/12/2010	1:24:09 PM	Helium MFC set to  0.000000
3/12/2010	1:24:09 PM	H2 MFC set to  500.000000
3/12/2010	1:24:09 PM	BCl3 MFC set to  0.000000
3/12/2010	1:24:09 PM	SiCl4 MFC set to  0.000000
3/12/2010	1:24:09 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:24:09 PM	Tube furnace set to 0
3/12/2010	1:25:32 PM	Helium valve closed
3/12/2010	1:25:32 PM	BCl3 valve closed
3/12/2010	1:25:32 PM	PH3 valve closed
3/12/2010	1:25:32 PM	SiCl4 pre valve closed
3/12/2010	1:25:32 PM	SiCl4 post valve closed
3/12/2010	1:25:32 PM	Main Vac valve closed
3/12/2010	1:25:32 PM	Bypass valve closed
3/12/2010	1:25:32 PM	H2 valve opened
3/12/2010	1:25:32 PM	Bubbler valve opened
3/12/2010	1:25:32 PM	Helium MFC set to  0.000000
3/12/2010	1:25:32 PM	H2 MFC set to  500.000000
3/12/2010	1:25:32 PM	BCl3 MFC set to  0.000000
3/12/2010	1:25:32 PM	SiCl4 MFC set to  0.000000
3/12/2010	1:25:32 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:25:32 PM	Tube furnace set to 0
3/12/2010	1:45:33 PM	Helium valve closed
3/12/2010	1:45:33 PM	PH3 valve closed
3/12/2010	1:45:33 PM	Main Vac valve closed
3/12/2010	1:45:33 PM	Bypass valve closed
3/12/2010	1:45:33 PM	H2 valve opened
3/12/2010	1:45:33 PM	BCl3 valve opened
3/12/2010	1:45:33 PM	SiCl4 pre valve opened
3/12/2010	1:45:33 PM	SiCl4 post valve opened
3/12/2010	1:45:33 PM	Bubbler valve opened
3/12/2010	1:45:33 PM	Helium MFC set to  0.000000
3/12/2010	1:45:33 PM	H2 MFC set to  500.000000
3/12/2010	1:45:33 PM	BCl3 MFC set to  35.000000
3/12/2010	1:45:33 PM	SiCl4 MFC set to  325.000000
3/12/2010	1:45:33 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	1:45:33 PM	Tube furnace set to 0
3/12/2010	2:00:33 PM	Helium valve closed
3/12/2010	2:00:33 PM	BCl3 valve closed
3/12/2010	2:00:33 PM	PH3 valve closed
3/12/2010	2:00:33 PM	SiCl4 pre valve closed
3/12/2010	2:00:33 PM	SiCl4 post valve closed
3/12/2010	2:00:33 PM	Main Vac valve closed
3/12/2010	2:00:33 PM	Bypass valve closed
3/12/2010	2:00:33 PM	H2 valve opened
3/12/2010	2:00:33 PM	Bubbler valve opened
3/12/2010	2:00:33 PM	Helium MFC set to  0.000000
3/12/2010	2:00:33 PM	H2 MFC set to  500.000000
3/12/2010	2:00:33 PM	BCl3 MFC set to  0.000000
3/12/2010	2:00:33 PM	SiCl4 MFC set to  0.000000
3/12/2010	2:00:33 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:00:33 PM	Tube furnace set to 0
3/12/2010	2:20:34 PM	H2 valve closed
3/12/2010	2:20:34 PM	BCl3 valve closed
3/12/2010	2:20:34 PM	PH3 valve closed
3/12/2010	2:20:34 PM	SiCl4 pre valve closed
3/12/2010	2:20:34 PM	SiCl4 post valve closed
3/12/2010	2:20:34 PM	Main Vac valve closed
3/12/2010	2:20:34 PM	Bypass valve closed
3/12/2010	2:20:34 PM	Helium valve opened
3/12/2010	2:20:34 PM	Bubbler valve opened
3/12/2010	2:20:34 PM	Helium MFC set to  500.000000
3/12/2010	2:20:34 PM	H2 MFC set to  0.000000
3/12/2010	2:20:34 PM	BCl3 MFC set to  0.000000
3/12/2010	2:20:34 PM	SiCl4 MFC set to  0.000000
3/12/2010	2:20:34 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:20:34 PM	Tube furnace set to 0
3/12/2010	2:40:34 PM	Helium valve closed
3/12/2010	2:40:34 PM	H2 valve closed
3/12/2010	2:40:34 PM	BCl3 valve closed
3/12/2010	2:40:34 PM	PH3 valve closed
3/12/2010	2:40:34 PM	SiCl4 pre valve closed
3/12/2010	2:40:34 PM	SiCl4 post valve closed
3/12/2010	2:40:34 PM	Main Vac valve closed
3/12/2010	2:40:34 PM	Bypass valve closed
3/12/2010	2:40:34 PM	Bubbler valve closed
3/12/2010	2:40:34 PM	Helium MFC set to  0.000000
3/12/2010	2:40:34 PM	H2 MFC set to  0.000000
3/12/2010	2:40:34 PM	BCl3 MFC set to  0.000000
3/12/2010	2:40:34 PM	SiCl4 MFC set to  0.000000
3/12/2010	2:40:34 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	2:40:34 PM	Tube furnace set to 0
3/12/2010	2:40:34 PM	Run finished at 2:40 PM
3/12/2010	3:10:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:10:24 PM	Recipe started at 3:10 PM
3/12/2010	3:10:24 PM	H2 valve closed
3/12/2010	3:10:24 PM	BCl3 valve closed
3/12/2010	3:10:24 PM	PH3 valve closed
3/12/2010	3:10:24 PM	SiCl4 pre valve closed
3/12/2010	3:10:24 PM	SiCl4 post valve closed
3/12/2010	3:10:24 PM	Main Vac valve closed
3/12/2010	3:10:24 PM	Bypass valve closed
3/12/2010	3:10:24 PM	Bubbler valve closed
3/12/2010	3:10:24 PM	Helium valve opened
3/12/2010	3:10:24 PM	Helium MFC set to  500.000000
3/12/2010	3:10:24 PM	H2 MFC set to  0.000000
3/12/2010	3:10:24 PM	BCl3 MFC set to  0.000000
3/12/2010	3:10:24 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:10:24 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:10:24 PM	Tube furnace set to 0
3/12/2010	3:10:24 PM	Helium valve closed
3/12/2010	3:10:24 PM	H2 valve closed
3/12/2010	3:10:24 PM	BCl3 valve closed
3/12/2010	3:10:24 PM	PH3 valve closed
3/12/2010	3:10:24 PM	SiCl4 pre valve closed
3/12/2010	3:10:24 PM	SiCl4 post valve closed
3/12/2010	3:10:24 PM	Main Vac valve closed
3/12/2010	3:10:24 PM	Bypass valve closed
3/12/2010	3:10:24 PM	Bubbler valve closed
3/12/2010	3:10:24 PM	Helium MFC set to  0.000000
3/12/2010	3:10:24 PM	H2 MFC set to  0.000000
3/12/2010	3:10:24 PM	BCl3 MFC set to  0.000000
3/12/2010	3:10:24 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:10:24 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:10:24 PM	Tube furnace set to 0
3/12/2010	3:10:25 PM	Run finished at 3:10 PM
3/12/2010	3:10:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:15:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:15:19 PM	Recipe started at 3:15 PM
3/12/2010	3:15:19 PM	H2 valve closed
3/12/2010	3:15:19 PM	BCl3 valve closed
3/12/2010	3:15:19 PM	PH3 valve closed
3/12/2010	3:15:19 PM	SiCl4 pre valve closed
3/12/2010	3:15:19 PM	SiCl4 post valve closed
3/12/2010	3:15:19 PM	Main Vac valve closed
3/12/2010	3:15:19 PM	Bypass valve closed
3/12/2010	3:15:19 PM	Bubbler valve closed
3/12/2010	3:15:19 PM	Helium valve opened
3/12/2010	3:15:19 PM	Helium MFC set to  500.000000
3/12/2010	3:15:19 PM	H2 MFC set to  0.000000
3/12/2010	3:15:19 PM	BCl3 MFC set to  0.000000
3/12/2010	3:15:19 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:15:19 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:15:19 PM	Tube furnace set to 0
3/12/2010	3:15:20 PM	Helium valve closed
3/12/2010	3:15:20 PM	H2 valve closed
3/12/2010	3:15:20 PM	BCl3 valve closed
3/12/2010	3:15:20 PM	PH3 valve closed
3/12/2010	3:15:20 PM	SiCl4 pre valve closed
3/12/2010	3:15:20 PM	SiCl4 post valve closed
3/12/2010	3:15:20 PM	Main Vac valve closed
3/12/2010	3:15:20 PM	Bypass valve closed
3/12/2010	3:15:20 PM	Bubbler valve closed
3/12/2010	3:15:20 PM	Helium MFC set to  0.000000
3/12/2010	3:15:20 PM	H2 MFC set to  0.000000
3/12/2010	3:15:20 PM	BCl3 MFC set to  0.000000
3/12/2010	3:15:20 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:15:20 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:15:20 PM	Tube furnace set to 0
3/12/2010	3:15:20 PM	Run finished at 3:15 PM
3/12/2010	3:15:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:15:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:15:22 PM	Recipe started at 3:15 PM
3/12/2010	3:15:22 PM	Helium valve closed
3/12/2010	3:15:22 PM	H2 valve closed
3/12/2010	3:15:22 PM	BCl3 valve closed
3/12/2010	3:15:22 PM	PH3 valve closed
3/12/2010	3:15:22 PM	SiCl4 pre valve closed
3/12/2010	3:15:22 PM	SiCl4 post valve closed
3/12/2010	3:15:22 PM	Main Vac valve closed
3/12/2010	3:15:22 PM	Bubbler valve closed
3/12/2010	3:15:22 PM	Bypass valve opened
3/12/2010	3:15:22 PM	Helium MFC set to  0.000000
3/12/2010	3:15:22 PM	H2 MFC set to  0.000000
3/12/2010	3:15:22 PM	BCl3 MFC set to  0.000000
3/12/2010	3:15:22 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:15:22 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:15:22 PM	Tube furnace set to 0
3/12/2010	3:15:54 PM	Helium valve closed
3/12/2010	3:15:54 PM	H2 valve closed
3/12/2010	3:15:54 PM	BCl3 valve closed
3/12/2010	3:15:54 PM	PH3 valve closed
3/12/2010	3:15:54 PM	SiCl4 pre valve closed
3/12/2010	3:15:54 PM	SiCl4 post valve closed
3/12/2010	3:15:54 PM	Bubbler valve closed
3/12/2010	3:15:54 PM	Main Vac valve opened
3/12/2010	3:15:54 PM	Bypass valve opened
3/12/2010	3:15:54 PM	Helium MFC set to  0.000000
3/12/2010	3:15:54 PM	H2 MFC set to  0.000000
3/12/2010	3:15:54 PM	BCl3 MFC set to  0.000000
3/12/2010	3:15:54 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:15:54 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:15:54 PM	Tube furnace set to 0
3/12/2010	3:15:54 PM	Run finished at 3:15 PM
3/12/2010	3:15:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:28:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:28:16 PM	Recipe started at 3:28 PM
3/12/2010	3:28:16 PM	H2 valve closed
3/12/2010	3:28:16 PM	BCl3 valve closed
3/12/2010	3:28:16 PM	PH3 valve closed
3/12/2010	3:28:16 PM	SiCl4 pre valve closed
3/12/2010	3:28:16 PM	SiCl4 post valve closed
3/12/2010	3:28:16 PM	Main Vac valve closed
3/12/2010	3:28:16 PM	Bypass valve closed
3/12/2010	3:28:16 PM	Bubbler valve closed
3/12/2010	3:28:16 PM	Helium valve opened
3/12/2010	3:28:16 PM	Helium MFC set to  500.000000
3/12/2010	3:28:16 PM	H2 MFC set to  0.000000
3/12/2010	3:28:16 PM	BCl3 MFC set to  0.000000
3/12/2010	3:28:16 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:28:16 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:28:16 PM	Tube furnace set to 0
3/12/2010	3:29:37 PM	Helium valve closed
3/12/2010	3:29:37 PM	H2 valve closed
3/12/2010	3:29:37 PM	BCl3 valve closed
3/12/2010	3:29:37 PM	PH3 valve closed
3/12/2010	3:29:37 PM	SiCl4 pre valve closed
3/12/2010	3:29:37 PM	SiCl4 post valve closed
3/12/2010	3:29:37 PM	Main Vac valve closed
3/12/2010	3:29:37 PM	Bypass valve closed
3/12/2010	3:29:37 PM	Bubbler valve closed
3/12/2010	3:29:37 PM	Helium MFC set to  0.000000
3/12/2010	3:29:37 PM	H2 MFC set to  0.000000
3/12/2010	3:29:37 PM	BCl3 MFC set to  0.000000
3/12/2010	3:29:37 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:29:37 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:29:37 PM	Tube furnace set to 0
3/12/2010	3:29:37 PM	Run finished at 3:29 PM
3/12/2010	3:29:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	3:35:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:35:22 PM	Recipe started at 3:35 PM
3/12/2010	3:35:22 PM	Helium valve closed
3/12/2010	3:35:22 PM	H2 valve closed
3/12/2010	3:35:22 PM	BCl3 valve closed
3/12/2010	3:35:22 PM	PH3 valve closed
3/12/2010	3:35:22 PM	SiCl4 pre valve closed
3/12/2010	3:35:22 PM	SiCl4 post valve closed
3/12/2010	3:35:22 PM	Main Vac valve closed
3/12/2010	3:35:22 PM	Bubbler valve closed
3/12/2010	3:35:22 PM	Bypass valve opened
3/12/2010	3:35:22 PM	Helium MFC set to  0.000000
3/12/2010	3:35:22 PM	H2 MFC set to  0.000000
3/12/2010	3:35:22 PM	BCl3 MFC set to  0.000000
3/12/2010	3:35:22 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:35:22 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:35:22 PM	Tube furnace set to 0
3/12/2010	3:35:53 PM	Helium valve closed
3/12/2010	3:35:53 PM	H2 valve closed
3/12/2010	3:35:53 PM	BCl3 valve closed
3/12/2010	3:35:53 PM	PH3 valve closed
3/12/2010	3:35:53 PM	SiCl4 pre valve closed
3/12/2010	3:35:53 PM	SiCl4 post valve closed
3/12/2010	3:35:53 PM	Bubbler valve closed
3/12/2010	3:35:53 PM	Main Vac valve opened
3/12/2010	3:35:53 PM	Bypass valve opened
3/12/2010	3:35:53 PM	Helium MFC set to  0.000000
3/12/2010	3:35:53 PM	H2 MFC set to  0.000000
3/12/2010	3:35:53 PM	BCl3 MFC set to  0.000000
3/12/2010	3:35:53 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:35:53 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:35:53 PM	Tube furnace set to 0
3/12/2010	3:35:53 PM	Run finished at 3:35 PM
3/12/2010	3:35:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	3:37:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	3:37:13 PM	Recipe started at 3:37 PM
3/12/2010	3:37:13 PM	H2 valve closed
3/12/2010	3:37:13 PM	BCl3 valve closed
3/12/2010	3:37:13 PM	PH3 valve closed
3/12/2010	3:37:13 PM	SiCl4 pre valve closed
3/12/2010	3:37:13 PM	SiCl4 post valve closed
3/12/2010	3:37:13 PM	Main Vac valve closed
3/12/2010	3:37:13 PM	Bypass valve closed
3/12/2010	3:37:13 PM	Bubbler valve closed
3/12/2010	3:37:13 PM	Helium valve opened
3/12/2010	3:37:13 PM	Helium MFC set to  500.000000
3/12/2010	3:37:13 PM	H2 MFC set to  0.000000
3/12/2010	3:37:13 PM	BCl3 MFC set to  0.000000
3/12/2010	3:37:13 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:37:13 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:37:13 PM	Tube furnace set to 0
3/12/2010	3:38:36 PM	Helium valve closed
3/12/2010	3:38:36 PM	H2 valve closed
3/12/2010	3:38:36 PM	BCl3 valve closed
3/12/2010	3:38:36 PM	PH3 valve closed
3/12/2010	3:38:36 PM	SiCl4 pre valve closed
3/12/2010	3:38:36 PM	SiCl4 post valve closed
3/12/2010	3:38:36 PM	Main Vac valve closed
3/12/2010	3:38:36 PM	Bypass valve closed
3/12/2010	3:38:36 PM	Bubbler valve closed
3/12/2010	3:38:36 PM	Helium MFC set to  0.000000
3/12/2010	3:38:36 PM	H2 MFC set to  0.000000
3/12/2010	3:38:36 PM	BCl3 MFC set to  0.000000
3/12/2010	3:38:36 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:38:36 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:38:36 PM	Tube furnace set to 0
3/12/2010	3:38:52 PM	Helium valve closed
3/12/2010	3:38:52 PM	H2 valve closed
3/12/2010	3:38:52 PM	BCl3 valve closed
3/12/2010	3:38:52 PM	PH3 valve closed
3/12/2010	3:38:52 PM	SiCl4 pre valve closed
3/12/2010	3:38:52 PM	SiCl4 post valve closed
3/12/2010	3:38:52 PM	Main Vac valve closed
3/12/2010	3:38:52 PM	Bubbler valve closed
3/12/2010	3:38:52 PM	Bypass valve opened
3/12/2010	3:38:52 PM	Helium MFC set to  0.000000
3/12/2010	3:38:52 PM	H2 MFC set to  0.000000
3/12/2010	3:38:52 PM	BCl3 MFC set to  0.000000
3/12/2010	3:38:52 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:38:52 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:38:52 PM	Tube furnace set to 0
3/12/2010	3:39:14 PM	Helium valve closed
3/12/2010	3:39:14 PM	H2 valve closed
3/12/2010	3:39:14 PM	BCl3 valve closed
3/12/2010	3:39:14 PM	PH3 valve closed
3/12/2010	3:39:14 PM	SiCl4 pre valve closed
3/12/2010	3:39:14 PM	SiCl4 post valve closed
3/12/2010	3:39:14 PM	Bubbler valve closed
3/12/2010	3:39:14 PM	Main Vac valve opened
3/12/2010	3:39:14 PM	Bypass valve opened
3/12/2010	3:39:14 PM	Helium MFC set to  0.000000
3/12/2010	3:39:14 PM	H2 MFC set to  0.000000
3/12/2010	3:39:14 PM	BCl3 MFC set to  0.000000
3/12/2010	3:39:14 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:39:14 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:39:14 PM	Tube furnace set to 0
3/12/2010	3:44:14 PM	H2 valve closed
3/12/2010	3:44:14 PM	BCl3 valve closed
3/12/2010	3:44:14 PM	PH3 valve closed
3/12/2010	3:44:14 PM	SiCl4 pre valve closed
3/12/2010	3:44:14 PM	SiCl4 post valve closed
3/12/2010	3:44:14 PM	Main Vac valve closed
3/12/2010	3:44:14 PM	Bypass valve closed
3/12/2010	3:44:14 PM	Bubbler valve closed
3/12/2010	3:44:14 PM	Helium valve opened
3/12/2010	3:44:14 PM	Helium MFC set to  500.000000
3/12/2010	3:44:14 PM	H2 MFC set to  0.000000
3/12/2010	3:44:14 PM	BCl3 MFC set to  0.000000
3/12/2010	3:44:14 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:44:14 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:44:14 PM	Tube furnace set to 0
3/12/2010	3:45:37 PM	Helium valve closed
3/12/2010	3:45:37 PM	H2 valve closed
3/12/2010	3:45:37 PM	BCl3 valve closed
3/12/2010	3:45:37 PM	PH3 valve closed
3/12/2010	3:45:37 PM	SiCl4 pre valve closed
3/12/2010	3:45:37 PM	SiCl4 post valve closed
3/12/2010	3:45:37 PM	Main Vac valve closed
3/12/2010	3:45:37 PM	Bypass valve closed
3/12/2010	3:45:37 PM	Bubbler valve closed
3/12/2010	3:45:37 PM	Helium MFC set to  0.000000
3/12/2010	3:45:37 PM	H2 MFC set to  0.000000
3/12/2010	3:45:37 PM	BCl3 MFC set to  0.000000
3/12/2010	3:45:37 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:45:37 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:45:37 PM	Tube furnace set to 0
3/12/2010	3:45:52 PM	Helium valve closed
3/12/2010	3:45:52 PM	H2 valve closed
3/12/2010	3:45:52 PM	BCl3 valve closed
3/12/2010	3:45:52 PM	PH3 valve closed
3/12/2010	3:45:52 PM	SiCl4 pre valve closed
3/12/2010	3:45:52 PM	SiCl4 post valve closed
3/12/2010	3:45:52 PM	Main Vac valve closed
3/12/2010	3:45:52 PM	Bubbler valve closed
3/12/2010	3:45:52 PM	Bypass valve opened
3/12/2010	3:45:52 PM	Helium MFC set to  0.000000
3/12/2010	3:45:52 PM	H2 MFC set to  0.000000
3/12/2010	3:45:52 PM	BCl3 MFC set to  0.000000
3/12/2010	3:45:52 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:45:52 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:45:52 PM	Tube furnace set to 0
3/12/2010	3:46:15 PM	Helium valve closed
3/12/2010	3:46:15 PM	H2 valve closed
3/12/2010	3:46:15 PM	BCl3 valve closed
3/12/2010	3:46:15 PM	PH3 valve closed
3/12/2010	3:46:15 PM	SiCl4 pre valve closed
3/12/2010	3:46:15 PM	SiCl4 post valve closed
3/12/2010	3:46:15 PM	Bubbler valve closed
3/12/2010	3:46:15 PM	Main Vac valve opened
3/12/2010	3:46:15 PM	Bypass valve opened
3/12/2010	3:46:15 PM	Helium MFC set to  0.000000
3/12/2010	3:46:15 PM	H2 MFC set to  0.000000
3/12/2010	3:46:15 PM	BCl3 MFC set to  0.000000
3/12/2010	3:46:15 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:46:15 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:46:15 PM	Tube furnace set to 0
3/12/2010	3:51:15 PM	H2 valve closed
3/12/2010	3:51:15 PM	BCl3 valve closed
3/12/2010	3:51:15 PM	PH3 valve closed
3/12/2010	3:51:15 PM	SiCl4 pre valve closed
3/12/2010	3:51:15 PM	SiCl4 post valve closed
3/12/2010	3:51:15 PM	Main Vac valve closed
3/12/2010	3:51:15 PM	Bypass valve closed
3/12/2010	3:51:15 PM	Bubbler valve closed
3/12/2010	3:51:15 PM	Helium valve opened
3/12/2010	3:51:15 PM	Helium MFC set to  500.000000
3/12/2010	3:51:15 PM	H2 MFC set to  0.000000
3/12/2010	3:51:15 PM	BCl3 MFC set to  0.000000
3/12/2010	3:51:15 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:51:15 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:51:15 PM	Tube furnace set to 0
3/12/2010	3:52:38 PM	Helium valve closed
3/12/2010	3:52:38 PM	H2 valve closed
3/12/2010	3:52:38 PM	BCl3 valve closed
3/12/2010	3:52:38 PM	PH3 valve closed
3/12/2010	3:52:38 PM	SiCl4 pre valve closed
3/12/2010	3:52:38 PM	SiCl4 post valve closed
3/12/2010	3:52:38 PM	Main Vac valve closed
3/12/2010	3:52:38 PM	Bypass valve closed
3/12/2010	3:52:38 PM	Bubbler valve closed
3/12/2010	3:52:38 PM	Helium MFC set to  0.000000
3/12/2010	3:52:38 PM	H2 MFC set to  0.000000
3/12/2010	3:52:38 PM	BCl3 MFC set to  0.000000
3/12/2010	3:52:38 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:52:38 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:52:38 PM	Tube furnace set to 0
3/12/2010	3:52:53 PM	Helium valve closed
3/12/2010	3:52:53 PM	H2 valve closed
3/12/2010	3:52:53 PM	BCl3 valve closed
3/12/2010	3:52:53 PM	PH3 valve closed
3/12/2010	3:52:53 PM	SiCl4 pre valve closed
3/12/2010	3:52:53 PM	SiCl4 post valve closed
3/12/2010	3:52:53 PM	Main Vac valve closed
3/12/2010	3:52:53 PM	Bubbler valve closed
3/12/2010	3:52:53 PM	Bypass valve opened
3/12/2010	3:52:53 PM	Helium MFC set to  0.000000
3/12/2010	3:52:53 PM	H2 MFC set to  0.000000
3/12/2010	3:52:53 PM	BCl3 MFC set to  0.000000
3/12/2010	3:52:53 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:52:53 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:52:53 PM	Tube furnace set to 0
3/12/2010	3:53:16 PM	Helium valve closed
3/12/2010	3:53:16 PM	H2 valve closed
3/12/2010	3:53:16 PM	BCl3 valve closed
3/12/2010	3:53:16 PM	PH3 valve closed
3/12/2010	3:53:16 PM	SiCl4 pre valve closed
3/12/2010	3:53:16 PM	SiCl4 post valve closed
3/12/2010	3:53:16 PM	Bubbler valve closed
3/12/2010	3:53:16 PM	Main Vac valve opened
3/12/2010	3:53:16 PM	Bypass valve opened
3/12/2010	3:53:16 PM	Helium MFC set to  0.000000
3/12/2010	3:53:16 PM	H2 MFC set to  0.000000
3/12/2010	3:53:16 PM	BCl3 MFC set to  0.000000
3/12/2010	3:53:16 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:53:16 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:53:16 PM	Tube furnace set to 0
3/12/2010	3:58:16 PM	Helium valve closed
3/12/2010	3:58:16 PM	H2 valve closed
3/12/2010	3:58:16 PM	BCl3 valve closed
3/12/2010	3:58:16 PM	PH3 valve closed
3/12/2010	3:58:16 PM	SiCl4 pre valve closed
3/12/2010	3:58:16 PM	SiCl4 post valve closed
3/12/2010	3:58:16 PM	Bubbler valve closed
3/12/2010	3:58:16 PM	Main Vac valve opened
3/12/2010	3:58:16 PM	Bypass valve opened
3/12/2010	3:58:16 PM	Helium MFC set to  0.000000
3/12/2010	3:58:16 PM	H2 MFC set to  0.000000
3/12/2010	3:58:16 PM	BCl3 MFC set to  0.000000
3/12/2010	3:58:16 PM	SiCl4 MFC set to  0.000000
3/12/2010	3:58:16 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	3:58:16 PM	Tube furnace set to 0
3/12/2010	3:58:17 PM	Run finished at 3:58 PM
3/12/2010	3:58:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/12/2010	3:58:46 PM	Bypass valve closed
3/12/2010	3:58:47 PM	Main Vac valve closed
3/12/2010	3:59:13 PM	Bypass valve opened
3/12/2010	3:59:14 PM	Main Vac valve opened
3/12/2010	4:00:01 PM	Recipe started at 4:00 PM
3/12/2010	4:00:01 PM	Helium valve closed
3/12/2010	4:00:01 PM	BCl3 valve closed
3/12/2010	4:00:01 PM	PH3 valve closed
3/12/2010	4:00:01 PM	SiCl4 pre valve closed
3/12/2010	4:00:01 PM	SiCl4 post valve closed
3/12/2010	4:00:01 PM	Main Vac valve closed
3/12/2010	4:00:01 PM	Bypass valve closed
3/12/2010	4:00:01 PM	Bubbler valve closed
3/12/2010	4:00:01 PM	H2 valve opened
3/12/2010	4:00:01 PM	Helium MFC set to  0.000000
3/12/2010	4:00:01 PM	H2 MFC set to  500.000000
3/12/2010	4:00:01 PM	BCl3 MFC set to  0.000000
3/12/2010	4:00:01 PM	SiCl4 MFC set to  0.000000
3/12/2010	4:00:01 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:00:01 PM	Tube furnace set to 0
3/12/2010	4:01:24 PM	Helium valve closed
3/12/2010	4:01:24 PM	BCl3 valve closed
3/12/2010	4:01:24 PM	PH3 valve closed
3/12/2010	4:01:24 PM	SiCl4 pre valve closed
3/12/2010	4:01:24 PM	SiCl4 post valve closed
3/12/2010	4:01:24 PM	Main Vac valve closed
3/12/2010	4:01:24 PM	Bypass valve closed
3/12/2010	4:01:24 PM	H2 valve opened
3/12/2010	4:01:24 PM	Bubbler valve opened
3/12/2010	4:01:24 PM	Helium MFC set to  0.000000
3/12/2010	4:01:24 PM	H2 MFC set to  500.000000
3/12/2010	4:01:24 PM	BCl3 MFC set to  0.000000
3/12/2010	4:01:24 PM	SiCl4 MFC set to  0.000000
3/12/2010	4:01:24 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:01:24 PM	Tube furnace set to 0
3/12/2010	4:21:24 PM	Helium valve closed
3/12/2010	4:21:24 PM	PH3 valve closed
3/12/2010	4:21:24 PM	Main Vac valve closed
3/12/2010	4:21:24 PM	Bypass valve closed
3/12/2010	4:21:24 PM	H2 valve opened
3/12/2010	4:21:24 PM	BCl3 valve opened
3/12/2010	4:21:24 PM	SiCl4 pre valve opened
3/12/2010	4:21:24 PM	SiCl4 post valve opened
3/12/2010	4:21:24 PM	Bubbler valve opened
3/12/2010	4:21:24 PM	Helium MFC set to  0.000000
3/12/2010	4:21:24 PM	H2 MFC set to  500.000000
3/12/2010	4:21:24 PM	BCl3 MFC set to  35.000000
3/12/2010	4:21:24 PM	SiCl4 MFC set to  325.000000
3/12/2010	4:21:24 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:21:24 PM	Tube furnace set to 0
3/12/2010	4:36:25 PM	Helium valve closed
3/12/2010	4:36:25 PM	BCl3 valve closed
3/12/2010	4:36:25 PM	PH3 valve closed
3/12/2010	4:36:25 PM	SiCl4 pre valve closed
3/12/2010	4:36:25 PM	SiCl4 post valve closed
3/12/2010	4:36:25 PM	Main Vac valve closed
3/12/2010	4:36:25 PM	Bypass valve closed
3/12/2010	4:36:25 PM	H2 valve opened
3/12/2010	4:36:25 PM	Bubbler valve opened
3/12/2010	4:36:25 PM	Helium MFC set to  0.000000
3/12/2010	4:36:25 PM	H2 MFC set to  500.000000
3/12/2010	4:36:25 PM	BCl3 MFC set to  0.000000
3/12/2010	4:36:25 PM	SiCl4 MFC set to  0.000000
3/12/2010	4:36:25 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:36:25 PM	Tube furnace set to 0
3/12/2010	4:56:25 PM	H2 valve closed
3/12/2010	4:56:25 PM	BCl3 valve closed
3/12/2010	4:56:25 PM	PH3 valve closed
3/12/2010	4:56:25 PM	SiCl4 pre valve closed
3/12/2010	4:56:25 PM	SiCl4 post valve closed
3/12/2010	4:56:25 PM	Main Vac valve closed
3/12/2010	4:56:25 PM	Bypass valve closed
3/12/2010	4:56:25 PM	Helium valve opened
3/12/2010	4:56:25 PM	Bubbler valve opened
3/12/2010	4:56:25 PM	Helium MFC set to  500.000000
3/12/2010	4:56:25 PM	H2 MFC set to  0.000000
3/12/2010	4:56:25 PM	BCl3 MFC set to  0.000000
3/12/2010	4:56:25 PM	SiCl4 MFC set to  0.000000
3/12/2010	4:56:25 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	4:56:25 PM	Tube furnace set to 0
3/12/2010	5:16:26 PM	Helium valve closed
3/12/2010	5:16:26 PM	H2 valve closed
3/12/2010	5:16:26 PM	BCl3 valve closed
3/12/2010	5:16:26 PM	PH3 valve closed
3/12/2010	5:16:26 PM	SiCl4 pre valve closed
3/12/2010	5:16:26 PM	SiCl4 post valve closed
3/12/2010	5:16:26 PM	Main Vac valve closed
3/12/2010	5:16:26 PM	Bypass valve closed
3/12/2010	5:16:26 PM	Bubbler valve closed
3/12/2010	5:16:26 PM	Helium MFC set to  0.000000
3/12/2010	5:16:26 PM	H2 MFC set to  0.000000
3/12/2010	5:16:26 PM	BCl3 MFC set to  0.000000
3/12/2010	5:16:26 PM	SiCl4 MFC set to  0.000000
3/12/2010	5:16:26 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:16:26 PM	Tube furnace set to 0
3/12/2010	5:16:26 PM	Run finished at 5:16 PM
3/12/2010	5:16:46 PM	H2 valve opened
3/12/2010	5:16:51 PM	H2 valve closed
3/12/2010	5:16:57 PM	H2 MFC set to  200.000000
3/12/2010	5:16:58 PM	H2 valve opened
3/12/2010	5:17:03 PM	Bubbler valve opened
3/12/2010	5:17:16 PM	Bubbler valve closed
3/12/2010	5:17:17 PM	H2 valve closed
3/12/2010	5:17:22 PM	H2 MFC set to  0.000000
3/12/2010	5:20:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	5:20:56 PM	Recipe started at 5:20 PM
3/12/2010	5:20:56 PM	Helium valve closed
3/12/2010	5:20:56 PM	H2 valve closed
3/12/2010	5:20:56 PM	BCl3 valve closed
3/12/2010	5:20:56 PM	PH3 valve closed
3/12/2010	5:20:56 PM	SiCl4 pre valve closed
3/12/2010	5:20:56 PM	SiCl4 post valve closed
3/12/2010	5:20:56 PM	Main Vac valve closed
3/12/2010	5:20:56 PM	Bubbler valve closed
3/12/2010	5:20:56 PM	Bypass valve opened
3/12/2010	5:20:56 PM	Helium MFC set to  0.000000
3/12/2010	5:20:56 PM	H2 MFC set to  0.000000
3/12/2010	5:20:56 PM	BCl3 MFC set to  0.000000
3/12/2010	5:20:56 PM	SiCl4 MFC set to  0.000000
3/12/2010	5:20:56 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:20:56 PM	Tube furnace set to 0
3/12/2010	5:21:25 PM	Helium valve closed
3/12/2010	5:21:25 PM	H2 valve closed
3/12/2010	5:21:25 PM	BCl3 valve closed
3/12/2010	5:21:25 PM	PH3 valve closed
3/12/2010	5:21:25 PM	SiCl4 pre valve closed
3/12/2010	5:21:25 PM	SiCl4 post valve closed
3/12/2010	5:21:25 PM	Bubbler valve closed
3/12/2010	5:21:25 PM	Main Vac valve opened
3/12/2010	5:21:25 PM	Bypass valve opened
3/12/2010	5:21:25 PM	Helium MFC set to  0.000000
3/12/2010	5:21:25 PM	H2 MFC set to  0.000000
3/12/2010	5:21:25 PM	BCl3 MFC set to  0.000000
3/12/2010	5:21:25 PM	SiCl4 MFC set to  0.000000
3/12/2010	5:21:25 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	5:21:25 PM	Tube furnace set to 0
3/12/2010	5:21:26 PM	Run finished at 5:21 PM
3/12/2010	5:21:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	5:54:26 PM	Bypass valve closed
3/12/2010	5:54:27 PM	Bypass valve opened
3/12/2010	5:54:27 PM	Bypass valve closed
3/12/2010	5:54:28 PM	Bypass valve opened
3/12/2010	5:57:27 PM	Program started after a nonstandard shutdown
3/12/2010	5:57:27 PM	Helium valve closed
3/12/2010	5:57:27 PM	H2 valve closed
3/12/2010	5:57:27 PM	BCl3 valve closed
3/12/2010	5:57:27 PM	PH3 valve closed
3/12/2010	5:57:27 PM	SiCl4 pre valve closed
3/12/2010	5:57:27 PM	SiCl4 post valve closed
3/12/2010	5:57:27 PM	Main Vac valve closed
3/12/2010	5:57:27 PM	Bypass valve closed
3/12/2010	5:57:27 PM	Bubbler valve closed
3/12/2010	5:57:27 PM	Helium MFC set to  0.000000
3/12/2010	5:57:27 PM	H2 MFC set to  0.000000
3/12/2010	5:57:27 PM	BCl3 MFC set to  0.000000
3/12/2010	5:57:27 PM	SiCl4 MFC set to  0.000000
3/12/2010	5:57:27 PM	Bypass solenoid MFC set to  760.000000
3/12/2010	5:57:27 PM	Tube furnace set to 0
3/12/2010	5:58:10 PM	Bypass valve opened
3/12/2010	5:58:10 PM	Main Vac valve opened
3/12/2010	6:01:59 PM	Program started after a nonstandard shutdown
3/12/2010	6:01:59 PM	Helium valve closed
3/12/2010	6:01:59 PM	H2 valve closed
3/12/2010	6:01:59 PM	BCl3 valve closed
3/12/2010	6:01:59 PM	PH3 valve closed
3/12/2010	6:01:59 PM	SiCl4 pre valve closed
3/12/2010	6:01:59 PM	SiCl4 post valve closed
3/12/2010	6:01:59 PM	Main Vac valve closed
3/12/2010	6:01:59 PM	Bypass valve closed
3/12/2010	6:01:59 PM	Bubbler valve closed
3/12/2010	6:01:59 PM	Helium MFC set to  0.000000
3/12/2010	6:01:59 PM	H2 MFC set to  0.000000
3/12/2010	6:01:59 PM	BCl3 MFC set to  0.000000
3/12/2010	6:01:59 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:01:59 PM	Bypass solenoid MFC set to  760.000000
3/12/2010	6:01:59 PM	Tube furnace set to 0
3/12/2010	6:02:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	6:02:02 PM	Recipe started at 6:02 PM
3/12/2010	6:02:02 PM	Helium valve closed
3/12/2010	6:02:02 PM	H2 valve closed
3/12/2010	6:02:02 PM	BCl3 valve closed
3/12/2010	6:02:02 PM	PH3 valve closed
3/12/2010	6:02:02 PM	SiCl4 pre valve closed
3/12/2010	6:02:02 PM	SiCl4 post valve closed
3/12/2010	6:02:02 PM	Main Vac valve closed
3/12/2010	6:02:02 PM	Bubbler valve closed
3/12/2010	6:02:02 PM	Bypass valve opened
3/12/2010	6:02:02 PM	Helium MFC set to  0.000000
3/12/2010	6:02:02 PM	H2 MFC set to  0.000000
3/12/2010	6:02:02 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:02 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:02 PM	Tube furnace set to 0
3/12/2010	6:02:02 PM	Helium valve closed
3/12/2010	6:02:02 PM	H2 valve closed
3/12/2010	6:02:02 PM	BCl3 valve closed
3/12/2010	6:02:02 PM	PH3 valve closed
3/12/2010	6:02:02 PM	SiCl4 pre valve closed
3/12/2010	6:02:02 PM	SiCl4 post valve closed
3/12/2010	6:02:02 PM	Bubbler valve closed
3/12/2010	6:02:02 PM	Main Vac valve opened
3/12/2010	6:02:02 PM	Bypass valve opened
3/12/2010	6:02:02 PM	Helium MFC set to  0.000000
3/12/2010	6:02:02 PM	H2 MFC set to  0.000000
3/12/2010	6:02:02 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:02 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:02 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:02 PM	Tube furnace set to 0
3/12/2010	6:02:02 PM	Run finished at 6:02 PM
3/12/2010	6:02:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	6:02:07 PM	Program exited cleanly
3/12/2010	6:02:16 PM	Program started normally
3/12/2010	6:02:16 PM	Helium valve closed
3/12/2010	6:02:16 PM	H2 valve closed
3/12/2010	6:02:16 PM	BCl3 valve closed
3/12/2010	6:02:16 PM	PH3 valve closed
3/12/2010	6:02:16 PM	SiCl4 pre valve closed
3/12/2010	6:02:16 PM	SiCl4 post valve closed
3/12/2010	6:02:16 PM	Main Vac valve closed
3/12/2010	6:02:16 PM	Bypass valve closed
3/12/2010	6:02:16 PM	Bubbler valve closed
3/12/2010	6:02:16 PM	Helium MFC set to  0.000000
3/12/2010	6:02:16 PM	H2 MFC set to  0.000000
3/12/2010	6:02:16 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:16 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:16 PM	Bypass solenoid MFC set to  760.000000
3/12/2010	6:02:16 PM	Tube furnace set to 0
3/12/2010	6:02:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	6:02:19 PM	Recipe started at 6:02 PM
3/12/2010	6:02:19 PM	Helium valve closed
3/12/2010	6:02:19 PM	H2 valve closed
3/12/2010	6:02:19 PM	BCl3 valve closed
3/12/2010	6:02:19 PM	PH3 valve closed
3/12/2010	6:02:19 PM	SiCl4 pre valve closed
3/12/2010	6:02:19 PM	SiCl4 post valve closed
3/12/2010	6:02:19 PM	Main Vac valve closed
3/12/2010	6:02:19 PM	Bubbler valve closed
3/12/2010	6:02:19 PM	Bypass valve opened
3/12/2010	6:02:19 PM	Helium MFC set to  0.000000
3/12/2010	6:02:19 PM	H2 MFC set to  0.000000
3/12/2010	6:02:19 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:19 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:19 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:19 PM	Tube furnace set to 0
3/12/2010	6:02:19 PM	Helium valve closed
3/12/2010	6:02:19 PM	H2 valve closed
3/12/2010	6:02:19 PM	BCl3 valve closed
3/12/2010	6:02:19 PM	PH3 valve closed
3/12/2010	6:02:19 PM	SiCl4 pre valve closed
3/12/2010	6:02:19 PM	SiCl4 post valve closed
3/12/2010	6:02:19 PM	Bubbler valve closed
3/12/2010	6:02:19 PM	Main Vac valve opened
3/12/2010	6:02:19 PM	Bypass valve opened
3/12/2010	6:02:19 PM	Helium MFC set to  0.000000
3/12/2010	6:02:19 PM	H2 MFC set to  0.000000
3/12/2010	6:02:19 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:19 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:19 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:19 PM	Tube furnace set to 0
3/12/2010	6:02:20 PM	Run finished at 6:02 PM
3/12/2010	6:02:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	6:02:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2010	6:02:25 PM	Recipe started at 6:02 PM
3/12/2010	6:02:25 PM	Helium valve closed
3/12/2010	6:02:25 PM	H2 valve closed
3/12/2010	6:02:25 PM	BCl3 valve closed
3/12/2010	6:02:25 PM	PH3 valve closed
3/12/2010	6:02:25 PM	SiCl4 pre valve closed
3/12/2010	6:02:25 PM	SiCl4 post valve closed
3/12/2010	6:02:25 PM	Main Vac valve closed
3/12/2010	6:02:25 PM	Bypass valve closed
3/12/2010	6:02:25 PM	Bubbler valve closed
3/12/2010	6:02:25 PM	Helium MFC set to  0.000000
3/12/2010	6:02:25 PM	H2 MFC set to  0.000000
3/12/2010	6:02:25 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:25 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:25 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:25 PM	Tube furnace set to 0
3/12/2010	6:02:25 PM	Run finished at 6:02 PM
3/12/2010	6:02:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/12/2010	6:02:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	6:02:31 PM	Recipe started at 6:02 PM
3/12/2010	6:02:31 PM	Helium valve closed
3/12/2010	6:02:31 PM	H2 valve closed
3/12/2010	6:02:31 PM	BCl3 valve closed
3/12/2010	6:02:31 PM	PH3 valve closed
3/12/2010	6:02:31 PM	SiCl4 pre valve closed
3/12/2010	6:02:31 PM	SiCl4 post valve closed
3/12/2010	6:02:31 PM	Main Vac valve closed
3/12/2010	6:02:31 PM	Bubbler valve closed
3/12/2010	6:02:31 PM	Bypass valve opened
3/12/2010	6:02:31 PM	Helium MFC set to  0.000000
3/12/2010	6:02:31 PM	H2 MFC set to  0.000000
3/12/2010	6:02:31 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:31 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:31 PM	Tube furnace set to 0
3/12/2010	6:02:32 PM	Helium valve closed
3/12/2010	6:02:32 PM	H2 valve closed
3/12/2010	6:02:32 PM	BCl3 valve closed
3/12/2010	6:02:32 PM	PH3 valve closed
3/12/2010	6:02:32 PM	SiCl4 pre valve closed
3/12/2010	6:02:32 PM	SiCl4 post valve closed
3/12/2010	6:02:32 PM	Bubbler valve closed
3/12/2010	6:02:32 PM	Main Vac valve opened
3/12/2010	6:02:32 PM	Bypass valve opened
3/12/2010	6:02:32 PM	Helium MFC set to  0.000000
3/12/2010	6:02:32 PM	H2 MFC set to  0.000000
3/12/2010	6:02:32 PM	BCl3 MFC set to  0.000000
3/12/2010	6:02:32 PM	SiCl4 MFC set to  0.000000
3/12/2010	6:02:32 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	6:02:32 PM	Tube furnace set to 0
3/12/2010	6:02:32 PM	Run finished at 6:02 PM
3/12/2010	6:02:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	11:44:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	11:44:09 PM	Recipe started at 11:44 PM
3/12/2010	11:44:09 PM	H2 valve closed
3/12/2010	11:44:09 PM	BCl3 valve closed
3/12/2010	11:44:09 PM	PH3 valve closed
3/12/2010	11:44:10 PM	SiCl4 pre valve closed
3/12/2010	11:44:10 PM	SiCl4 post valve closed
3/12/2010	11:44:10 PM	Main Vac valve closed
3/12/2010	11:44:10 PM	Bypass valve closed
3/12/2010	11:44:10 PM	Bubbler valve closed
3/12/2010	11:44:10 PM	Helium valve opened
3/12/2010	11:44:10 PM	Helium MFC set to  500.000000
3/12/2010	11:44:10 PM	H2 MFC set to  0.000000
3/12/2010	11:44:10 PM	BCl3 MFC set to  0.000000
3/12/2010	11:44:10 PM	SiCl4 MFC set to  0.000000
3/12/2010	11:44:10 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	11:44:10 PM	Tube furnace set to 0
3/12/2010	11:45:31 PM	Helium valve closed
3/12/2010	11:45:31 PM	H2 valve closed
3/12/2010	11:45:31 PM	BCl3 valve closed
3/12/2010	11:45:31 PM	PH3 valve closed
3/12/2010	11:45:31 PM	SiCl4 pre valve closed
3/12/2010	11:45:31 PM	SiCl4 post valve closed
3/12/2010	11:45:31 PM	Main Vac valve closed
3/12/2010	11:45:31 PM	Bypass valve closed
3/12/2010	11:45:31 PM	Bubbler valve closed
3/12/2010	11:45:31 PM	Helium MFC set to  0.000000
3/12/2010	11:45:31 PM	H2 MFC set to  0.000000
3/12/2010	11:45:31 PM	BCl3 MFC set to  0.000000
3/12/2010	11:45:31 PM	SiCl4 MFC set to  0.000000
3/12/2010	11:45:31 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	11:45:31 PM	Tube furnace set to 0
3/12/2010	11:45:32 PM	Run finished at 11:45 PM
3/12/2010	11:45:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/12/2010	11:48:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/12/2010	11:48:55 PM	Recipe started at 11:48 PM
3/12/2010	11:48:55 PM	Helium valve closed
3/12/2010	11:48:55 PM	H2 valve closed
3/12/2010	11:48:55 PM	BCl3 valve closed
3/12/2010	11:48:55 PM	PH3 valve closed
3/12/2010	11:48:55 PM	SiCl4 pre valve closed
3/12/2010	11:48:55 PM	SiCl4 post valve closed
3/12/2010	11:48:55 PM	Main Vac valve closed
3/12/2010	11:48:55 PM	Bubbler valve closed
3/12/2010	11:48:55 PM	Bypass valve opened
3/12/2010	11:48:55 PM	Helium MFC set to  0.000000
3/12/2010	11:48:55 PM	H2 MFC set to  0.000000
3/12/2010	11:48:55 PM	BCl3 MFC set to  0.000000
3/12/2010	11:48:55 PM	SiCl4 MFC set to  0.000000
3/12/2010	11:48:55 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	11:48:55 PM	Tube furnace set to 0
3/12/2010	11:49:25 PM	Helium valve closed
3/12/2010	11:49:25 PM	H2 valve closed
3/12/2010	11:49:25 PM	BCl3 valve closed
3/12/2010	11:49:25 PM	PH3 valve closed
3/12/2010	11:49:25 PM	SiCl4 pre valve closed
3/12/2010	11:49:25 PM	SiCl4 post valve closed
3/12/2010	11:49:25 PM	Bubbler valve closed
3/12/2010	11:49:25 PM	Main Vac valve opened
3/12/2010	11:49:25 PM	Bypass valve opened
3/12/2010	11:49:25 PM	Helium MFC set to  0.000000
3/12/2010	11:49:25 PM	H2 MFC set to  0.000000
3/12/2010	11:49:25 PM	BCl3 MFC set to  0.000000
3/12/2010	11:49:25 PM	SiCl4 MFC set to  0.000000
3/12/2010	11:49:25 PM	Bypass solenoid MFC set to  0.000000
3/12/2010	11:49:25 PM	Tube furnace set to 0
3/12/2010	11:49:26 PM	Run finished at 11:49 PM
3/12/2010	11:49:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
